Tubular Mirror Support Post for Residual Sacrificial Layer Removal
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Solution Overview
Problem
Existing electrooptical apparatus production methods face challenges such as the formation of dimples on mirror surfaces due to residual sacrificial layers, which reduce reflectance, and the complexity of processes involving inorganic material polishing and metal layer formation, leading to inefficient production and potential gas-related degradation.
Innovation Solution
The development of a tubular mirror support post design with an open end at the substrate side, integrated with a torsion hinge, allows for the removal of sacrificial layers without residue, preventing gas production and eliminating the need for inorganic material polishing, while maintaining structural integrity and avoiding dimple formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If inorganic material is accumulated on mirror support posts and polished to fill recess portions, then mirror surface flatness is improved, but processing time increases significantly
Solution Approach 1:
The invention performs preliminary action by forming a flat-topped mirror support post structure during the initial formation process, preventing recess portion formation before it occurs. This eliminates the need for subsequent inorganic material accumulation and polishing steps, resolving the contradiction between achieving mirror surface flatness and minimizing processing time.
Solution Approach 2:
The invention extracts and removes the sacrificial layer completely from within the mirror support post structure by designing an open-ended tubular configuration. This prevents residual sacrificial layer from causing mirror surface deformation, achieving flatness without requiring time-consuming polishing operations.
2Strength
If metal layer is formed on columnar resin layer to create mirror support post, then structural integrity is improved, but gas production from sacrificial layer degrades mirror reflectance
Solution Approach 1:
The invention extracts and removes the sacrificial layer completely from the mirror support post structure by designing an open-ended tubular configuration that allows access to the interior. This eliminates the source of gas production that would otherwise degrade mirror reflectance, while maintaining structural integrity through the metal layer formation on the external surface.
Solution Approach 2:
The tubular mirror support post structure creates a porous or open configuration that allows complete removal of the sacrificial layer. This structural design enables the metal layer to form a continuous protective and structural coating while ensuring no trapped sacrificial layer remains to produce harmful gas.
3Reliability
If two metal layers with insulating intermediate layer are formed to create torsion hinge and mirror support post, then functional requirements are met, but production process complexity increases
Solution Approach 1:
The invention merges the formation of the torsion hinge and mirror support post into a single integrated structure formed from one metal layer. This consolidation maintains the necessary functional separation between the torsion hinge (for rotation) and mirror support post (for positioning) while eliminating the complexity of forming two separate metal layers with an insulating intermediate layer between them.
Solution Approach 2:
The single metal layer structure serves multiple functions simultaneously: it forms both the torsion hinge mechanism and the mirror support post structure. This multi-functional design achieves the required electrical and mechanical separation without requiring separate metal layers, simplifying the production process while maintaining reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances light utilization efficiency, maintains mirror reflectance, and simplifies the production process by eliminating the need for complex inorganic material removal and metal layer formation, thereby improving the reliability and efficiency of electrooptical apparatuses.
Implementation Method 1
a tubular second support post (mirror support post) which is protruded from the torsion hinge toward a side opposite the substrate and whose first end portion at a torsion hinge side has an open end that faces the substrate
Implementation Method 2
If, at this time, the mirror support post of a mirror has a recess portion facing a side opposite the substrate, a large dimple is formed on the surface of the mirror, so that the reflectance of the surface of the mirror (reflecting surface thereof) decreases
Implementation Method 3
an electroconductive member in which a twist hinge (torsion hinge) supported by the substrate via the first support post and a tubular second support post (mirror support post) which is protruded from the torsion hinge toward a side opposite the substrate
Implementation Method 4
an electroconductive member in which a twist hinge (torsion hinge) supported by the substrate via the first support post and a tubular second support post (mirror support post) which is protruded from the torsion hinge toward a side opposite the substrate
Data Source
AI summary
An electrooptical apparatus includes a torsion hinge and a mirror support post that are formed integrally with an electroconductive member. Of the mirror support post (second support post), a first end portion at a substrate side has an open end whose opening faces the substrate. Of the mirror support post, a second end portion at a mirror side is a flat plate portion that closes the opening of the mirror support post. A mirror is in contact with the opposite side of the flat plate portion to the substrate. A first sacrificial layer for use for production of the electrooptical apparatus is formed by exposing and developing a photosensitive resist.