Tubular Sputtering Target Liquid Metal Coating Densification
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Solution Overview
Problem
The challenge lies in efficiently manufacturing tubular sputtering targets of sufficient length for large-scale applications while maintaining high sputtering properties, as existing methods face issues with energy efficiency, arcing, and achieving non-segmented targets with uniform coatings.
Innovation Solution
A process involving a carrier tube coated with a liquid metal phase, followed by densification using tools like rolls or forging to apply contact pressure, ensuring high relative density and low porosity, and optimizing the energy balance to achieve a non-segmented metal coating with improved sputtering properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If tubular sputtering targets are manufactured by casting or powder metallurgical methods, then segmented sputtering materials can be obtained, but manufacturing complexity increases and additional assembly steps are required
Solution Approach 1:
The invention combines multiple manufacturing operations (coating application, solidification, and densification) into a single integrated process sequence, eliminating the need for separate assembly steps required by casting or powder metallurgical methods. The metal coating is applied directly to the carrier tube and densified in situ, creating a non-segmented target that requires no additional assembly.
2Ease of manufacture
If conventional coating methods are used without densification, then manufacturing is simpler, but coating porosity remains high and sputtering properties deteriorate
Solution Approach 1:
The densification step is performed as a preliminary action to the final sputtering process, consolidating the metal coating structure before use. This preliminary densification eliminates porosity issues that would otherwise require complex manufacturing controls, ensuring high coating density and homogeneity while maintaining process simplicity.
3Productivity
If high power is applied during sputtering, then productivity increases, but arcing occurs causing local melting and material ejection
Solution Approach 1:
The invention changes the physical parameters of the sputtering target by densifying the metal coating structure, which fundamentally alters how the material responds to high power input. The densified structure with eliminated porosity prevents arc initiation and propagation, enabling high power sputtering without the harmful effects of arcing, thus simultaneously increasing productivity and maintaining reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the production of tubular sputtering targets that can operate at high power with low arcing, providing a sputtered product of high homogeneity and efficiency, overcoming previous manufacturing challenges.
Implementation Method 1
applying a liquid metal phase onto the carrier tube and solidifying the liquid metal phase
Implementation Method 2
applying a contact pressure to the metal coating by at least one densification tool
Data Source
Figure 1~2
Figure 3
AI summary
The present invention relates to a process for preparing a tubular article, comprising (a) providing a carrier tube, (b) providing a metal coating on the carrier tube by applying a liquid metal phase onto the carrier tube and solidifying the liquid metal phase, (c) applying a contact pressure to the metal coating by at least one densification tool, and moving the densification tool and the metal coating relative to each other.