Tubular Sputtering Target Locking Mechanism
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Solution Overview
Problem
Existing tubular targets for cathode sputtering systems are difficult to assemble securely and efficiently, as they require multiple components and complex securing methods like screws and union nuts.
Innovation Solution
A tubular target with integrated connecting pieces featuring locking mechanisms that prevent rotation, allowing for a secure, vacuum-tight connection with fewer components, using locking lugs, flanges, and soldering for easy assembly and disassembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple components and complex securing methods (screws, union nuts) are used to connect the target body, then the connection reliability is improved, but the assembly complexity and time increase
Solution Approach 1:
The connecting piece integrates multiple functions into a single component: it provides vacuum sealing through its geometry, electrical connection through the conductive material, and anti-rotation locking through the integrally formed locking means (protruding lugs). This merging eliminates the need for separate screws, union nuts, and locking components, thereby reducing assembly complexity while maintaining connection reliability
2Strength
If multiple components and complex securing methods are used to connect the target body, then the connection strength is improved, but the assembly time is increased
Solution Approach 1:
The locking means (protruding lugs) and recesses are pre-formed as integral features of the connecting piece and target body respectively. When the connecting piece is inserted into the target body, the locking means automatically engage with the recesses to prevent rotation, eliminating the need for separate locking operations. This preliminary preparation of locking features significantly reduces assembly time while ensuring strong, twist-proof connection
3Ease of operation
If fewer components are used in the connecting piece, then the assembly ease is improved, but the connection reliability may be compromised
Solution Approach 1:
The connecting piece integrates multiple functions into a single component: it provides vacuum sealing through its geometry, electrical connection through the conductive material, and anti-rotation locking through the integrally formed locking means (protruding lugs). This merging eliminates the need for separate screws, union nuts, and locking components, thereby reducing assembly complexity while maintaining connection reliability
4Device complexity
If locking means are formed integrally with the connecting piece, then the component count is reduced, but the manufacturing precision requirements increase
Solution Approach 1:
The locking means (protruding lugs) are formed as integral features of the connecting piece through metal forming or machining operations. While this requires precise manufacturing to ensure proper engagement with recesses, it eliminates the need for separate locking components and their associated assembly steps. The integral formation ensures consistent geometry and positioning, actually improving reliability despite the precision requirement
Data Source
Figure 1~3
Figure 2
AI summary
The invention relates to a target (2a) for a cathode sputtering apparatus, comprising a tubular target body (4a) from a sputtering material and two connecting pieces (10a) that can be fixed to the target body (4a) for connecting the target body (4a) to the cathode sputtering apparatus, wherein a first connecting piece is connectable to a first end of the target body (4a) and a second connecting piece to a second end of the target body (4a), and wherein at least one locking means (12a-d) is formed on each connecting piece (10a) in order to connect the respective connecting piece (10a) to the target body (4a) in a rotationally fixed manner.