Tunable Gas Nozzle for Plasma Reactor Flow Control
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Solution Overview
Problem
Current plasma reactor systems fail to effectively control both radial and azimuthal distribution of process gas flow in plasma processing, leading to asymmetries and pressure drops, and are not easily disassembled without damage.
Innovation Solution
A plasma reactor design featuring a tunable gas nozzle system with a side gas plenum, N-way and M-way gas flow ratio controllers, and a gas delivery ring with O-ring seals, allowing for independent control of radial and azimuthal gas distributions and facilitating rapid assembly and disassembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If gas injectors are located at one flat layer, then the structure is simple, but the location of gas injectors is limited and has no particular effect upon gas flow within the chamber
Solution Approach 1:
The gas injector assembly transitions from a two-dimensional flat layer configuration to a three-dimensional structure with the side gas plenum extending radially inwardly from the side wall. This dimensional change allows gas injectors to be positioned at multiple radial distances from the chamber center, enabling independent control of radial and azimuthal gas flow distributions while improving gas flow control capability without significantly complicating the manufacturing process.
2Manufacturing precision
If systems control radial distribution of process gas flow rate, then radial gas distribution is improved, but azimuthal distribution of process gas flow rate is not controlled
Solution Approach 1:
The side gas plenum is divided into multiple separate gas distribution passages, with each passage serving a specific azimuthal sector of the chamber. Each passage can be independently controlled through separate gas inlet lines and flow control valves, enabling independent adjustment of gas flow rates to different azimuthal regions. This segmentation allows simultaneous control of both radial distribution (through overall flow rate control) and azimuthal distribution (through individual passage control).
3Ease of operation
If gas injectors are located near the side wall to control azimuthal distribution, then azimuthal control is improved, but pressure drops along the azimuthal direction occur
Solution Approach 1:
The side gas plenum acts as an intermediary component that receives process gas from the chamber center through the chamber center gas distributor and redistributes it to gas injectors along the side wall. This intermediary plenum structure provides a pressurized gas reservoir that compensates for pressure drops along the azimuthal direction, ensuring uniform gas flow delivery to all azimuthal zones without requiring high-pressure gas supply lines running the full azimuthal length.
4Device complexity
If gas distribution passages are formed in one layer, then the structure is simple, but the location of gas injectors is limited to that one layer
Solution Approach 1:
The side gas plenum is nested within the chamber structure, extending radially inwardly from the side wall into the chamber volume. This nested configuration allows the gas distribution system to utilize the three-dimensional space within the chamber rather than being confined to a single flat layer. The plenum can be positioned at various radial distances, and gas injectors can be located at multiple positions along its length, providing flexible injector placement while maintaining a relatively simple integrated structure.
Data Source
AI summary
A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.