Tunable MEMS Resonator DC Voltage Actuation

The patent applies the Dynamics principle by making the resonator's capacitance mechanically adjustable through a movable plate that can be positioned at different distances from the fixed electrode. This mechanical tuning capability allows the resonator to adapt its electrical characteristics dynamically, enabling it to handle large RF signals while maintaining controlled resonance frequency through active adjustment rather than passive fixed design

The patent implements Parameter changes by varying the physical position of the movable plate to change the capacitance value of the resonator. By mechanically adjusting the plate position, the electrical parameter (capacitance) is changed, which in turn adjusts the resonance frequency. This allows the resonator to compensate for frequency variations caused by large RF signals through controlled parameter modification

The patent applies Segmentation by dividing the resonator into distinct functional components: a fixed electrode, a movable plate, and a dielectric spacer. This segmentation allows independent optimization of each component's function while simplifying the overall design. The movable plate can be actuated independently to tune frequency without requiring complex mechanical assemblies, achieving frequency adaptability through simple, modular structural division

The patent uses the dielectric spacer as an intermediary element between the movable plate and the fixed electrode. This intermediary component serves multiple functions: it maintains a minimum gap to prevent electrical breakdown, provides mechanical support for the movable plate, and enables controlled capacitance variation. The spacer simplifies the mechanical structure by eliminating the need for complex positioning mechanisms while still achieving the desired frequency tuning range