Tunable Metasurface Sealed Chamber Design

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Solution Overview

Problem

Current optical metasurface technologies face challenges in efficiently steering and shaping optical beams due to limitations in tunability and control over refractive indices, particularly in reducing the volume of sealed chambers to enhance optical performance and minimize damage from cover deformation.

Innovation Solution

The implementation of tunable optical metasurfaces with sealed chambers containing liquid crystal or other refractive index tunable dielectric materials, where a controller applies voltage patterns to modify refractive indices and phase delays, combined with optically transmissive covers and spacers to reduce chamber volume and enhance beam steering capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of stationary object

If the sealed chamber volume is reduced to minimize liquid crystal volume, then optical performance is improved and manufacturing cost is reduced, but the risk of cover deformation and damage to optical structures increases

Engineering Contradiction:
Improvesealed chamber volumeVSAvoidcover deformation damage
Core Design Contradiction:
Volume of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a compliant layer between the cover and the optical structures that acts as a cushioning element. This layer absorbs and distributes mechanical stress from cover deformation, preventing direct transmission of harmful forces to the optical structures. The compliant layer's elastic properties allow it to deform accommodate cover irregularities while protecting the fragile optical components underneath.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent employs a compliant layer as an intermediary element between the cover and optical structures. This intermediate layer serves as a buffer that mediates the interaction between the cover and optical components, isolating the optical structures from direct mechanical contact with the potentially deforming cover while still allowing the sealed chamber to maintain its reduced volume.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If voltage patterns are applied to modify refractive indices for beam steering, then optical control capability is improved, but device complexity and energy consumption increase

Engineering Contradiction:
Improvebeam steering control capabilityVSAvoidvoltage control system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the voltage control system into multiple independent electrode segments that can be individually addressed and controlled. By segmenting the control system into discrete voltage zones, the patent enables precise local modification of refractive indices in different regions of the liquid crystal, achieving complex beam steering patterns through simple independent voltage applications to each segment.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements dynamic refractive index control by applying time-varying voltage patterns to the liquid crystal material. The system can rapidly switch between different voltage configurations to dynamically steer and shape optical beams in real-time, providing adaptive optical control capability that responds to changing operational requirements.

Inventive Principle:
Principle #15Dynamics

3Reliability

If spacers are added to prevent cover contact with optical structures, then protection of optical structures is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improveoptical structure protectionVSAvoiddevice assembly complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent combines the spacer function with the sealing structure by integrating support features directly into the sealant material or sealing layer. This merging of protective and sealing functions eliminates the need for separate spacer components, reducing the number of parts and simplifying the manufacturing process while still providing adequate protection against cover contact with optical structures.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent designs the sealant or sealing layer to serve multiple functions simultaneously: providing mechanical sealing to maintain the enclosed environment, providing structural support to prevent cover contact with optical structures, and potentially providing optical functionality. This multi-functional design eliminates the need for dedicated spacer components and simplifies the overall device architecture.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient beam steering and shaping across optical bandwidths, improving optical performance by minimizing liquid crystal volume and preventing cover-induced damage, while supporting applications in LiDAR, optical communications, and displays.

Implementation Method 1

A controller or metasurface driver selectively applies a pattern of voltages to an array of optical structures to selectively modify the refractive indices of regions of the dielectric material

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 2

A combination of phase delays created by the pattern of applied voltages creates constructive interference in the desired beam steering direction

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 3

an optically transmissive cover is sealed to the substrate to form a sealed chamber

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS11487183B1Tunable optical device configurations and packaging
Publication Date: 2022.11.01 LUMOTIVE INC
  • US11487183B1 patent drawing
  • US11487183B1 patent drawing
  • US11487183B1 patent drawing

AI summary

According to various embodiments, a cover is sealed over a metasurface on a substrate to create a sealed chamber. Liquid crystal, or another tunable refractive index dielectric material, is positioned within the sealed chamber around optical structures of the metasurface before or after the cover is sealed. For example, the liquid crystal may be injected through small vias or holes to fill a sealed chamber. In some embodiments, a glass cover is shaped or patterned with photoresist to protrude into the sealed chamber to reduce the thickness of the liquid crystal used to fill the sealed chamber. A driver to control the metasurface may be, for example, integrated within the substrate, be attached to exposed bond pads of the metasurface, and/or be embodied as a control layer connected to the metasurface through the substrate by through-substrate vias (TSVs).