Tunable MMI Power Splitter for Fabrication Error Compensation

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Solution Overview

Problem

Conventional power splitters in photonics chips have a fixed power splitting ratio, which hinders the compensation for fabrication imperfections and dynamic balancing for high-extinction and high signal-to-noise ratio performance.

Innovation Solution

A tunable power splitter structure incorporating a multimode interference coupler with a grating and resistive heating elements that allow for thermal tuning of the splitting ratio by varying the temperature of the grating lines.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a conventional fixed power splitter is used, then the structure is simple, but the power splitting ratio cannot be adjusted to compensate for fabrication imperfections

Engineering Contradiction:
Improvetunability of power splitting ratioVSAvoidstructure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The power splitter transitions from a fixed structure to a dynamically tunable device by incorporating a resistive heating element that can adjust the refractive index of the multimode interference coupler, enabling real-time adjustment of the power splitting ratio to compensate for fabrication variations

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention changes the physical parameter (refractive index) of the multimode interference coupler through thermal control using a resistive heating element, allowing dynamic adjustment of the power splitting ratio without changing the physical structure

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If a tunable power splitter with heating element is added, then the power splitting ratio can be adjusted, but the device complexity increases

Engineering Contradiction:
Improvecompensation for fabrication imperfectionsVSAvoidadditional heating element and control
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention uses thermal parameter changes in the multimode interference coupler to adjust the power splitting ratio, providing a compact and integrated solution that compensates for fabrication imperfections without requiring complex mechanical adjustments or additional optical components

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the multimode interference coupler with grating is used, then the extinction ratio is improved, but the fabrication precision requirements increase

Engineering Contradiction:
Improveextinction ratioVSAvoidgrating line precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The invention introduces dynamic tunability through thermal control, allowing the system to compensate for static fabrication variations in the grating structure, thereby maintaining high extinction ratio performance even with moderate fabrication precision

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The tunable power splitter enables feedback-based optimization of the power splitting ratio, where the device can be adjusted after fabrication to achieve the desired performance, compensating for variations in grating line precision

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure provides a compact, thermally tunable power splitter with low power consumption and low insertion loss, enhancing the extinction ratio and enabling dynamic adjustment of the splitting ratio.

Implementation Method 1

a resistive heating element adjacent to the grating lines

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS12619121B2Power splitters including a tunable multimode interference coupler
Publication Date: 2026.05.05 GLOBALFOUNDRIES US INC
  • US12619121B2 patent drawing
  • US12619121B2 patent drawing
  • US12619121B2 patent drawing

AI summary

Structures for a power splitter that include a multimode interference coupler and methods of forming such structures. The structure comprises a multimode interference coupler including a grating having a plurality of grating lines, an input waveguide core, and an output waveguide core. The grating lines are disposed between the input waveguide core and the output waveguide core. The structure further comprises a resistive heating element adjacent to the grating lines.