Tunable Reflective Array for Thermal Uniformity Control
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Solution Overview
Problem
Thermal processing systems face challenges in achieving uniform temperature profiles, leading to anomalies such as warpage in workpieces like semiconductor wafers due to non-uniform heating.
Innovation Solution
A thermal processing system incorporating a tunable reflective array with electrochromatic pixels between the heat source and workpiece, controlled by a controller to adjust the light transmission based on real-time temperature data from sensors, ensuring uniform heating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heat source heats the workpiece in a thermal processing system, then the workpiece temperature increases, but temperature non-uniformities develop across the workpiece surface
Solution Approach 1:
The reflective array is divided into multiple independently controllable pixels or zones, allowing different regions of the workpiece to receive customized light transmission. Each pixel can be individually adjusted to compensate for local temperature variations, thereby achieving uniform temperature distribution across the entire workpiece surface.
Solution Approach 2:
The system applies different light transmission properties to different spatial locations by controlling each pixel's reflectivity independently. This enables localized temperature adjustment where specific areas can be heated more or less depending on their current temperature state, resolving the non-uniformity issue while maintaining overall temperature increase.
2Manufacturing precision
If a tunable reflective array with multiple pixels is introduced to control light transmission, then temperature uniformity improves, but device complexity increases
Solution Approach 1:
The tunable reflective array serves as an intermediary component between the heat source and the workpiece. Rather than directly controlling the heat source or the workpiece, this intermediate element modulates light transmission to achieve temperature uniformity, simplifying the overall control architecture while maintaining precision.
Solution Approach 2:
The system replaces complex mechanical adjustment mechanisms with electro-optical or liquid crystal-based pixel control. This substitution enables precise temperature uniformity control through electrical signals rather than mechanical movements, reducing mechanical complexity while achieving the desired manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces temperature non-uniformity and associated anomalies like warpage by dynamically adjusting light transmission, enhancing processing uniformity and reducing thermal stresses.
Implementation Method 1
Each pixel of the plurality of pixels can include an electrochromatic material configurable in a translucent state or an opaque state. When the electrochromatic material of a pixel is configured in the translucent state, the light at least partially passes through the pixel. Conversely, transmission of light through a pixel is reduced when the electrochromatic material of the pixel is configured in the opaque state.
Implementation Method 2
a heat source configured to emit light towards the workpiece
Data Source
AI summary
A thermal processing system is provided. The thermal processing system can include a processing chamber and a workpiece disposed within the processing chamber. The thermal processing system can include a heat source configured to emit light towards the workpiece. The thermal processing system can further include a tunable reflective array disposed between the workpiece and the heat source. The tunable reflective array can include a plurality of pixels. Each pixel of the plurality of pixels can include an electrochromatic material configurable in a translucent state or an opaque state. When the electrochromatic material of a pixel is configured in the translucent state, the light at least partially passes through the pixel. Conversely, transmission of light through a pixel is reduced when the electrochromatic material of the pixel is configured in the opaque state.