Tunable Superstrate for RF Phase Velocity Matching in EO Modulators

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Solution Overview

Problem

Existing EO modulators, particularly those using LiNbO3, face limitations in achieving high modulation bandwidth due to mismatched RF phase and optical group velocities, which worsens at higher frequencies and specific wavelengths like 1310 nm and 1550 nm, restricting their operational bandwidth.

Innovation Solution

The design incorporates a substrate with an EO material layer and coplanar waveguide electrodes, where a superstrate is adjustable to match RF phase velocity with optical group velocity at various wavelengths, using a thin film adhesion-promoting layer and optical waveguides to confine light and optimize RF transmission, allowing for tuning across different wavelengths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If LiNbO3 is used as the EO material in traditional bulk modulators, then excellent power handling and longevity are achieved, but the modulation bandwidth is limited to about 30 GHz due to velocity mismatch between RF phase and optical group velocities

Engineering Contradiction:
Improvepower handling and longevityVSAvoidmodulation bandwidth
Core Design Contradiction:
ReliabilityVSSpeed

Solution Approach 1:

The patent transitions from bulk LiNbO3 to thin-film LiNbO3 (TFLN) technology, using a thin film EO material layer disposed over a substrate. This thin-film configuration reduces the dielectric cross-section for RF propagation, enabling RF phase velocity to match optical group velocity at much higher frequencies, achieving modulation bandwidths exceeding 100 GHz while maintaining the excellent reliability characteristics of LiNbO3.

Inventive Principle:
Principle #30Flexible shells and thin films

2Speed

If TFLN technology is used to achieve high modulation bandwidth, then bandwidth exceeding 100 GHz is achieved at 1550 nm, but the same bandwidth cannot be attained at 1310 nm due to monotonic decrease in optical group velocity with decreasing wavelength

Engineering Contradiction:
Improvemodulation bandwidth at 1550 nmVSAvoidoperational bandwidth across multiple wavelengths
Core Design Contradiction:
SpeedVSAdaptability or versatility

Solution Approach 1:

The patent introduces a tunable superstrate layer that can be dynamically adjusted to modify the RF phase velocity. By changing the distance between the superstrate and the EO material layer, the device can adapt its velocity matching condition to operate at different wavelengths, enabling high bandwidth operation at both 1310 nm and 1550 nm as well as other wavelengths in the optical spectrum.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent employs a tunable superstrate that modifies the effective dielectric environment of the RF transmission line. By adjusting parameters such as the superstrate distance or dielectric constant, the RF phase velocity can be tuned to match the wavelength-dependent optical group velocity, enabling broadband operation across multiple wavelengths despite the monotonic decrease in optical group velocity with decreasing wavelength.

Inventive Principle:
Principle #35Parameter changes

3Speed

If the superstrate is adjusted to match RF phase velocity with optical group velocity at one wavelength, then optimal bandwidth is achieved at that wavelength, but the matching deteriorates at other wavelengths

Engineering Contradiction:
Improvevelocity matching at specific wavelengthVSAvoidmulti-wavelength operation
Core Design Contradiction:
SpeedVSAdaptability or versatility

Solution Approach 1:

The patent employs a dynamically tunable superstrate mechanism that allows real-time adjustment of the RF phase velocity to match the optical group velocity at different wavelengths. This dynamic adaptability enables the device to maintain optimal velocity matching and high bandwidth performance across multiple wavelengths, rather than being fixed to a single wavelength optimization.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables EO modulators to maintain optimal RF phase and optical group velocity matching across multiple wavelengths, enhancing high-frequency modulation bandwidth and impedance matching, thereby overcoming previous limitations and achieving efficient operation at both 1310 nm and 1550 nm.

Implementation Method 1

high-speed (∼50 GHz and more) modulation of light is generally done using so-called 'external' modulators based on the linear (i.e., Pockels) electro-optic (EO) effect

Methodology Applied
Scientific EffectLinear electro-optic (Pockels) effect: Pockels Effect

Implementation Method 2

an optical waveguide having an optical group velocity

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Data Source

PatentUS12124150B2Radio frequency (RF) phase velocity tuner for setting an electrooptic (EO) modulator bandwidth at different optical wavelengths
Publication Date: 2024.10.22 KEYSIGHT TECHNOLOGIES INC
  • US12124150B2 patent drawing
  • US12124150B2 patent drawing
  • US12124150B2 patent drawing

AI summary

Electro-optic (EO) modulators are disclosed. The EO modulators include a substrate and an EO material layer disposed over the substrate. The EO material layer and the substrate provide an optical waveguide having an optical group velocity (OGV). The EO modulators also include electrodes disposed over the EO material layer to provide a coplanar waveguide (CPW). The CPW has a radio-frequency (RF) phase velocity, and the electrodes have a gap therebetween. The EO modulators also include a superstrate disposed over the EO material layer and configured to be raised and lowered, or disposed and removed to tune the RF phase velocity to be substantially the same as the OGV, wherein a space exists between the superstrate and the EO material.