Tunable VCSEL With Piezo-Actuated Cavity for High Sweep Frequency

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Solution Overview

Problem

Current tuneable laser sources for optical coherence tomography, particularly Fabry-Perot tuneable filters, are limited by low sweep frequency due to mechanical design limitations, leading to restricted high-frequency operation and stability issues in MEMS-based VCSELs.

Innovation Solution

A tuneable VCSEL design with a resonator cavity devoid of light guiding media, featuring a concave recess in one reflecting element and a piezo-electric actuator for modulating the optical path length, allowing for higher sweep frequencies and improved stability through coupled oscillating elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If Fabry-Perot tuneable filters are used for OCT, then wavelength tuning is achieved, but sweep frequency is limited due to mechanical design limitations

Engineering Contradiction:
Improvesweep frequencyVSAvoidmechanical design complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent replaces the traditional mechanical Fabry-Perot filter tuning system with a VCSEL-based system using piezo-electric actuators to modulate the optical path length directly within the laser cavity. This substitution eliminates the need for complex mechanical filter assemblies and enables higher sweep frequencies through direct electro-optic control.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the operating parameters by using piezo-electric actuators to dynamically adjust the optical path length in the VCSEL cavity, enabling rapid wavelength sweeping at frequencies exceeding 100 kHz. This parameter modulation approach replaces slow mechanical filter tuning with fast electro-mechanical actuation.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If MEMS-based VCSELs are used, then tuneability is achieved, but stability issues occur

Engineering Contradiction:
Improvewavelength tuneabilityVSAvoidoperational stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent segments the VCSEL structure into distinct functional components: separate piezo-electric actuators for optical path length control, independent dielectric mirrors for wavelength selection, and a dedicated gain medium. This segmentation allows each component to be optimized independently, improving overall stability while maintaining tuneability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention introduces piezo-electric actuators as intermediary elements between the control system and the optical cavity. These actuators provide stable, precise control of the optical path length without the mechanical contact and wear issues that plague direct MEMS implementations, thereby enhancing operational reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Stability of the object's composition

If light guiding media are present in the resonator cavity, then light confinement is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvelight confinementVSAvoidmanufacturing simplicity
Core Design Contradiction:
Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The patent extracts and removes light guiding media from the resonator cavity, relying instead on the natural resonant modes of the Fabry-Perot cavity formed by the dielectric mirrors. This extraction simplifies the device structure and manufacturing process while maintaining adequate light confinement through the cavity's geometric and optical properties.

Inventive Principle:
Principle #2Taking out (Extraction)

4Measurement precision

If conventional Fabry-Perot filters are used, then wavelength selection is achieved, but modulation amplitude is limited

Engineering Contradiction:
Improvewavelength selection precisionVSAvoidmodulation amplitude
Core Design Contradiction:
Measurement precisionVSLength of moving object

Solution Approach 1:

The invention implements dynamic modulation of the optical path length using piezo-electric actuators that can rapidly change the cavity length with large modulation amplitudes. This dynamic control enables both precise wavelength selection and large sweep ranges, overcoming the static limitations of conventional Fabry-Perot filters.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves higher sweep frequencies and improved reliability and reproducibility, overcoming the limitations of existing technologies by enabling larger modulation amplitudes and a larger free spectral range, while simplifying manufacturing and reducing thermal noise.

Implementation Method 1

a piezo-electric actuator for modulating the optical path length

Methodology Applied
Scientific EffectPiezo-electric effect: Piezoelectric Effect

Implementation Method 2

a resonator cavity having a gain medium provided therein

Methodology Applied
Scientific EffectOptical resonance: Resonance

Data Source

PatentEP2857876B1Tunable VCSEL
Publication Date: 2020.07.08 LUDWIG MAXIMILIANS UNIV MUNCHEN
  • EP2857876B1 patent drawingFigure 1~2
  • EP2857876B1 patent drawingFigure 3~4
  • EP2857876B1 patent drawingFigure 5(a)~5(b)

AI summary

Disclosed is a VCSEL (128) comprising a first and a second reflecting element separated by an optical path length to form an optical resonator cavity, a first actuator means mechanically coupled with one or both of said first and second reflecting elements, said first actuator means being configured to modulate the optical path length between said first and second reflecting elements by a modulation amplitude, and a waveguide, in particular an optical fiber, coupled with one of the reflecting elements for coupling light out of the resonator cavity, wherein the surface of at least one of the first and second reflecting elements has a concave recess (118) formed therein.