Double-Ended Tuning Fork Vibrator Interconnect Routing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing double-ended tuning fork vibrators face issues with vibration energy leakage to surrounding components, leading to changes in vibration frequency and reduced detection accuracy in physical quantity sensors due to the phenomenon of DIP (Dynamic Impedance Phenomenon), where vibration energy is absorbed by natural vibrations of surrounding components, increasing crystal impedance and altering the vibration frequency.
Innovation Solution
The design includes a double-ended tuning fork vibrator with specific configurations of excitation electrodes and interconnects on the vibration beams, where excitation electrodes are selectively disposed on surfaces of defined regions, and interconnects are strategically placed to avoid thin interconnect patterns that could be disconnected during photolithography, ensuring stable vibration without energy leakage to the bases, thereby preventing DIP and maintaining accurate frequency detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If excitation electrodes are disposed at a distance from both ends of the vibration beam to reduce vibration leakage, then vibration frequency stability is improved, but interconnect reliability deteriorates due to difficulty in preventing disconnection
Solution Approach 1:
The patent transitions from planar interconnect arrangement to three-dimensional arrangement by utilizing both front and back surfaces of the vibration beam. Interconnects are configured to extend between front and back surfaces, creating vertical connectivity that prevents disconnection while maintaining electrode positioning for vibration frequency stability.
Solution Approach 2:
The patent implements nested interconnect structures where multiple interconnects are arranged in overlapping or intertwined configurations between front and back surfaces. This nesting ensures that even if one interconnect path fails, alternative paths remain intact, thereby maintaining reliability without compromising the electrode positioning.
2Ease of manufacture
If multiple interconnects are arranged on single surface to couple excitation electrodes, then manufacturing is simplified, but vibration energy leakage to base increases
Solution Approach 1:
The patent distributes interconnects across three dimensions by utilizing both front and back surfaces of the vibration beam. This spatial distribution moves interconnects away from the base region, reducing vibration energy leakage while maintaining manufacturing feasibility through standardized multi-surface processing techniques.
3Measurement precision
If excitation electrodes are positioned远离from base to prevent DIP phenomenon, then detection accuracy is improved, but interconnect complexity increases
Solution Approach 1:
The patent resolves the complexity issue by utilizing the vertical dimension (front and back surfaces) to route interconnects. This three-dimensional arrangement achieves the required electrode positioning for accurate detection while managing interconnect complexity through systematic multi-surface configuration rather than overly complicated single-surface routing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents vibration energy leakage, stabilizes the vibration frequency, and enhances the detection accuracy of physical quantity sensors by reducing the influence of DIP, allowing for precise measurement of physical quantities like acceleration.
Implementation Method 1
a plurality of excitation electrodes provided at the vibration beam are selectively disposed on surfaces of the first excitation region, the second excitation region, and the third excitation region
Implementation Method 2
two vibration beams disposed parallel to each other between the pair of bases
Implementation Method 3
in order to reduce a vibration leakage from the vibration beam to the base
Data Source
AI summary
In a double-ended tuning fork vibrator, a pair of vibration beams having a pair of bases coupled to both ends have a first end region, a first excitation region, a first relay region, a second excitation region, a second relay region, a third excitation region, and a second end region in this order toward a first direction, and an interconnect coupling an excitation electrode in the first excitation region and an excitation electrode in the second excitation region and an interconnect coupling an excitation electrode in the first excitation region and an excitation electrode in the second excitation region are provided on a front surface of the first relay region.