Tuning-Fork Vibrator Weight Scars for Unwanted Vibration Suppression

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Solution Overview

Problem

Tuning-fork vibrator elements experience unwanted vibrations due to asymmetric groove shapes caused by etching anisotropy, leading to centroid shift and impaired vibration balance.

Innovation Solution

A vibrator element design featuring a vibrating arm with a weight part that includes processing scars formed by laser irradiation, where the scars are strategically placed to adjust the mass distribution and reduce unwanted vibrations by ensuring S1 < S2, aligning the centroid and wide portion centroids with the central axis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If grooves are formed using wet etching to enhance the piezoelectric effect, then the piezoelectric effect is enhanced, but the groove shape becomes asymmetric due to etching anisotropy, causing centroid shift and unwanted vibration

Engineering Contradiction:
Improvepiezoelectric effectVSAvoidgroove shape symmetry
Core Design Contradiction:
PowerVSManufacturing precision

Solution Approach 1:

The invention intentionally introduces asymmetric processing scars on the weight surface to counterbalance the asymmetric groove shapes caused by etching anisotropy. By strategically placing processing scars with different areas (S1 and S2) on opposite sides of the weight, the centroid is realigned with the central axis, eliminating unwanted vibrations while preserving the enhanced piezoelectric effect from the grooves.

Inventive Principle:
Principle #4Asymmetry

2Speed

If a weight is irradiated with laser beam to adjust frequency, then the frequency is adjusted, but the centroid shifts further from the central axis, increasing unwanted vibration

Engineering Contradiction:
Improvevibration frequencyVSAvoidcentroid position
Core Design Contradiction:
SpeedVSManufacturing precision

Solution Approach 1:

The invention applies localized processing scars with specific area ratios (S1 < S2) on different sides of the weight. This local modification of mass distribution allows frequency adjustment through selective material removal while simultaneously correcting the centroid position by creating an asymmetric counterbalance that realigns the centroid with the central axis.

Inventive Principle:
Principle #3Local quality

3Power

If the groove shape becomes asymmetric about the central axis, then the piezoelectric effect is enhanced through electrode placement, but the centroid shifts from the central axis, exciting unwanted vibration

Engineering Contradiction:
Improvepiezoelectric effectVSAvoidvibration quality
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The invention introduces asymmetric processing scars on the weight surface to counterbalance the asymmetric groove shapes. By strategically placing processing scars with different areas (S1 and S2) on opposite sides of the weight, the centroid is realigned with the central axis, eliminating unwanted vibrations while preserving the enhanced piezoelectric effect from the grooves.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively reduces unwanted vibrations and improves the vibration characteristics of the tuner-fork element by minimizing mass decrement in areas where processing scars are formed, thereby enhancing the angular velocity detection accuracy.

Implementation Method 1

forming at least one processing scar to the weight by irradiating the weight with a laser beam to thin or remove the weight in a thickness direction of the vibrating arm

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS11967944B2Vibrator element, vibrator device, and method of manufacturing vibrator element
Publication Date: 2024.04.23 SEIKO EPSON CORP
  • US11967944B2 patent drawing
  • US11967944B2 patent drawing
  • US11967944B2 patent drawing

AI summary

The vibrator element includes a vibrating arm provided with an arm part, and a weight part which has a weight, the weight is provided with at least one processing scar, when an axis which overlaps a center in a width direction of the vibrating arm, and which extends along an extending direction of the vibrating arm is a central axis, and an axis which overlaps a centroid of the vibrating arm, and which extends along the extending direction of the vibrating arm is a centroid axis, the processing scar is formed in at least an area at an opposite side to the centroid axis, and S1&lt;S2 an area of the processing scar located at the centroid axis side with respect to the central axis is S1, and an area of the processing scar located at an opposite side to the centroid axis with respect to the central axis is S2.