Turbine Cap With Conical Deflector For Turbo-Molecular Pump
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Solution Overview
Problem
Conventional turbo-molecular pumps require increased maintenance due to excessive residual process particulate accumulation in the bolt cavity, leading to contamination of semiconductor wafers, which is problematic with reduced process geometries.
Innovation Solution
A turbine cap assembly with a cap member, plate member, and o-ring system that allows adjustable compression to secure and seal the cap assembly to the turbine, preventing particle settlement and contamination, featuring a conically shaped upper surface to deflect particles toward the turbine fins for effective evacuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional turbine design with an open bolt cavity is used, then the turbine can be manufactured and assembled easily, but process particulate accumulates in the bolt cavity and is emitted back into the chamber, causing contamination
Solution Approach 1:
The turbine assembly is divided into separate components: the turbine body, the bolt cavity cover, and the cap assembly. This segmentation allows the bolt cavity to be sealed independently from the rest of the turbine structure, preventing particulate emission while maintaining manufacturing and assembly simplicity.
Solution Approach 2:
The problematic open bolt cavity is extracted and replaced with a sealed cap assembly. The cap assembly includes a cover that closes the bolt cavity and a cap that seals the open end, effectively removing the source of contamination from the system.
2Reliability
If the bolt cavity is sealed with a cap assembly, then particle accumulation is prevented, but the sealing mechanism requires additional components (o-ring, plate member, threaded bolt)
Solution Approach 1:
An o-ring is introduced as an intermediary sealing element between the cap member and the turbine body. This flexible seal provides reliable particle-free containment while allowing for simple assembly and disassembly operations, reducing the complexity of maintenance.
3Reliability
If the o-ring is compressed to ensure sealing, then reliable sealing is achieved, but the compression force requires precise adjustment of the threaded bolt
Solution Approach 1:
The threaded bolt provides adjustable compression force on the o-ring, allowing the sealing pressure to be dynamically tuned during assembly. This ensures reliable sealing while maintaining ease of operation, as the compression can be precisely controlled by the degree of bolt rotation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces contamination and extends maintenance intervals by preventing particle accumulation in the bolt cavity and ensuring reliable sealing and secure mounting without reconfiguring existing pumps.
Implementation Method 1
a first position in which the o-ring is compressed by the cap member and the plate member
Implementation Method 2
an o-ring disposed between the cap member and plate member
Data Source
AI summary
Systems here include cone shaped turbine caps mounted to a turbo molecular turbine assembly. In some embodiments, the turbo molecular turbine assembly includes a body with a top cavity, a bottom cavity and external fins, the body mounted to a pump rotor. In some embodiments, the turbo molecular turbine assembly and cone shaped turbine cap are configured to fit into a chamber and spun by the mounted pump rotor. In some embodiments, the turbine external fins are configured to pump gasses and suspended particles from the chamber when spun. And in some embodiments, the cone shaped turbine cap includes a vent channel for venting air from the top cavity.