Turbo-molecular pump rotor temperature control
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Solution Overview
Problem
Turbo-molecular pumps face issues with reactive product accumulation, leading to rotor stator fixation and damage, despite existing temperature control methods that fail to completely prevent accumulation, ultimately reducing pump operation time and maintenance intervals.
Innovation Solution
A temperature control device for turbo-molecular pumps that includes a rotor temperature detection system using a ferromagnetic target and sensor to detect magnetic permeability changes, allowing for precise heating control of the pump base portion to maintain the rotor temperature within a predetermined range, while informing maintenance through warning signals when accumulation thresholds are reached.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If heating of the pump base portion is performed to prevent reactive product accumulation, then the rotor is protected from abnormal temperature, but accumulation of reactive product cannot be completely prevented and maintenance intervals are reduced
Solution Approach 1:
The system uses rotor temperature detection to provide feedback for controlling base portion heating. The heating control section adjusts heating based on detected rotor temperature to maintain it within a predetermined range, creating a closed-loop control system that optimizes both rotor protection and accumulation prevention
Solution Approach 2:
The system changes the heating parameters dynamically by controlling the heating section based on rotor temperature detection. When rotor temperature approaches the predetermined upper limit, heating is reduced or stopped, allowing the base temperature to decrease and prevent excessive reactive product accumulation while still protecting the rotor
2Duration of action of stationary object
If rotor temperature is controlled by heating the base portion, then rotor life is extended, but reactive product accumulation increases over time leading to rotor-stator fixation
Solution Approach 1:
The heating control section continuously monitors rotor temperature via the detection section and adjusts heating accordingly. When rotor temperature reaches the predetermined upper limit, heating is controlled to prevent further temperature increase, which in turn prevents excessive reactive product accumulation that would lead to rotor-stator fixation
Solution Approach 2:
The heating operation is performed periodically or intermittently based on rotor temperature conditions rather than continuously. The heating control section activates heating when rotor temperature is below the upper limit and stops or reduces heating when the limit is approached, creating a periodic heating pattern that extends rotor life while controlling accumulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively extends rotor life and maintenance intervals by preventing reactive product accumulation, reducing the risk of rotor stator contact and damage, and optimizing temperature control accuracy regardless of gas type.
Implementation Method 1
a sensor disposed to face the ferromagnetic target to detect a magnetic permeability change of the ferromagnetic target, and the temperature of the rotor is detected based on the magnetic permeability change of the ferromagnetic target around a Curie point thereof
Implementation Method 2
a heating section configured to heat the pump base portion
Data Source
AI summary
A turbo-molecular pump includes a stator provided at a pump base portion, a rotor rotatably driven on the stator, a heating section configured to heat the pump base portion, abase temperature detection section configured to detect a temperature of the pump base portion, and a rotor temperature detection section configured to detect a temperature equivalent as a physical amount equivalent to a temperature of the rotor. A temperature control device of the turbo-molecular pump comprises: a heating control section configured to control heating of the pump base portion by the heating section based on a detection value of the rotor temperature detection section; and an informing section configured to inform a warning when a detection temperature of the base temperature detection section is equal to or lower than a predetermined threshold.