Turbo Pump Vent Assembly for Fast Rotor Deceleration
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Solution Overview
Problem
The existing methods for venting turbo pumps in high-vacuum processes, such as those used in semiconductor manufacturing, are complex and can cause high stresses and wear on the main bearing or bearing cage, leading to rotor instability and reduced operational life, as they rely on harsh venting techniques that are unreliable and can result in the turbo pump seizing.
Innovation Solution
A turbo pump vent assembly comprising a primary manual actuator for delivering an initial volume of air and a secondary manual actuator for delivering a greater secondary volume of air, allowing for controlled and rapid slowing of the turbo pump rotor, thereby reducing wear and extending operational life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If harsh venting using a conventional manual vent valve is used, then the turbo pump can be vented quickly, but high stresses and wear occur in the main bearing or bearing cage leading to rotor instability
Solution Approach 1:
The venting process is segmented into two distinct stages using two separate actuators: a first actuator for initial venting with a first volume of air, and a second actuator for subsequent venting with a second volume of air. This segmentation allows each actuator to be optimized for its specific function, with the first actuator providing controlled initial venting and the second actuator providing additional venting capacity without causing excessive stress on the bearing.
Solution Approach 2:
Different volumes of air are applied at different stages of the venting process. The first actuator delivers a first volume of air suitable for initial deceleration, while the second actuator delivers a second volume of air (greater than the first volume) for subsequent deceleration. This local differentiation in air volume allows optimized venting at each stage without subjecting the bearing to uniformly harsh conditions.
2Device complexity
If harsh venting using a conventional manual vent valve is used, then the venting process is simple, but the operational life of the turbo pump is reduced due to bearing wear
Solution Approach 1:
The venting mechanism is divided into two independent actuators, each capable of being operated separately. This segmentation allows the system to achieve reliable venting while distributing the stress across two controlled actions rather than one harsh action, thereby extending bearing life without significantly increasing overall system complexity.
Solution Approach 2:
The first actuator performs preliminary venting by delivering the first volume of air to initially decelerate the rotor. This preliminary action reduces the rotor speed to a level where subsequent venting by the second actuator can occur without causing excessive stress on the bearing, thereby protecting the bearing from immediate harsh conditions.
3Device complexity
If a single volume of air is used for venting, then the mechanism is simple, but the turbo pump cannot be slowed safely and quickly
Solution Approach 1:
The venting function is segmented into two actuators that deliver different volumes of air in sequence. This segmentation enables the system to deliver a larger total volume of air (first volume + second volume where second volume > first volume) more effectively than a single actuator, achieving faster and safer rotor deceleration while maintaining reasonable mechanical simplicity.
Solution Approach 2:
The system changes the parameter of air volume delivered during the venting process by using two actuators with different volumes. The first actuator delivers a controlled first volume, and the second actuator delivers a larger second volume, optimizing the deceleration profile to safely and quickly halt the rotor without requiring an overly complex single-actuator design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a simple, reliable, and effective mechanism to safely and quickly halt the turbo pump, reducing wear on components and extending its operational life by using differing air volumes to manage rotor deceleration.
Implementation Method 1
a primary manual actuator operable to deliver an initial volume of air to a turbo pump
Implementation Method 2
a secondary manual actuator operable to deliver a secondary volume of air to the turbo pump, wherein the secondary volume of air is greater than the initial volume of air
Implementation Method 3
an uncomplex and reliable vent is provided which can deliver initial volumes of air to slow the turbo pump initially. Thereafter, the secondary volume of air may be delivered to slow the turbo pump more rapidly
Data Source
AI summary
A turbo pump vent assembly and method are disclosed. The turbo pump vent assembly comprises: a primary manual actuator operable to deliver an initial volume of air to a turbo pump; and a secondary manual actuator operable to deliver a secondary volume of air to the turbo pump, wherein the secondary volume of air is greater than the initial volume of air. In this way, an uncomplex and reliable vent is provided which can deliver initial volumes of air to slow the turbo pump initially. Thereafter, the secondary volume of air may be delivered to slow the turbo pump more rapidly than is possible just using further initial volumes of air. Having an apparatus which can deliver differing volumes of air enables the turbo pump to be slowed safely and more quickly than is possible by delivering just the same sized volumes of air.