Turbomolecular Pump Shielding for Electromagnetic Interference

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Solution Overview

Problem

Vacuum pumps, particularly turbomolecular pumps, face operational disruptions and environmental contamination risks due to strong electrical and magnetic fields, which are prevalent in environments like mass spectrometers, where strict regulations must be adhered to.

Innovation Solution

Incorporating a shielding means, such as a copper or beryllium grid on the inlet and/or discharge flanges, to effectively shield the pump's interior from external electromagnetic influences, ensuring both internal and external components are protected from interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the vacuum pump is used in environments with strong electromagnetic fields (e.g., mass spectrometers), then the pump can operate in these applications, but the electromagnetic fields interfere with the electronic control of the pump and affect the surrounding environment

Engineering Contradiction:
Improveapplicability in electromagnetic field environmentsVSAvoidelectromagnetic interference
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces shielding means as an intermediary element between the electromagnetic field environment and the vacuum pump's electronic components. The shielding means, made of conductive material and integrated into the housing, acts as a mediator that blocks electromagnetic fields from reaching sensitive electronics while allowing the pump to function in the required environment.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The shielding means is designed to preemptively counteract electromagnetic interference before it can affect the pump's electronic control. By incorporating the shielding means into the housing structure, the system prepares in advance to neutralize harmful electromagnetic fields, preventing interference rather than addressing it after occurrence.

Inventive Principle:
Principle #9Preliminary anti-action

2Object-affected harmful factors

If shielding means is added to the vacuum pump housing, then electromagnetic shielding is improved, but the device complexity increases

Engineering Contradiction:
Improveelectromagnetic shieldingVSAvoidhousing structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The shielding means is merged with the housing structure, integrating the electromagnetic shielding function into the existing housing rather than adding it as a separate component. This combination reduces overall device complexity while maintaining effective shielding, as the housing simultaneously serves structural and electromagnetic protection functions.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The housing is designed to serve multiple functions: providing structural support, containing internal components, and simultaneously acting as an electromagnetic shield through the integrated shielding means. This multi-functionality reduces the need for additional dedicated shielding components, simplifying the overall device structure.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The shielding solution prevents external electromagnetic fields from disrupting the vacuum pump's operation and protects external electronic components, maintaining functionality while adhering to stringent environmental regulations.

Implementation Method 1

the shielding means is formed on the housing section for electromagnetic shielding of an interior of the pump from an exterior of the pump

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Implementation Method 2

the shielding means comprises copper and/or beryllium

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentEP3561306B1Vacuum pump
Publication Date: 2021.06.09 PFEIFFER VACUUM GMBH
  • EP3561306B1 patent drawingFigure 1
  • EP3561306B1 patent drawingFigure 2
  • EP3561306B1 patent drawingFigure 3

AI summary

Vacuum pump (10), in particular turbomolecular pump, with at least one housing section and at least one shielding means (20), wherein the shielding means is formed on the housing section for electromagnetic shielding of an interior of the pump from an exterior of the pump.