Turbomolecular Pump Getter Layout Without Inlet Length Increase
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Solution Overview
Problem
The installation of a gas absorbing metal portion and a heater portion in the form of a serpentine plate in the inlet port of a turbomolecular pump increases the axial length, making it difficult to fit within limited spaces.
Innovation Solution
The turbomolecular pump design includes a getter pump portion in the stator portion or casing, with a heater portion for activating and regenerating the gas absorbing substance, placed in specific members such as stator blade spacers, without increasing the axial length of the inlet port.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a gas absorbing metal portion and heater portion in the form of a serpentine plate are installed in the inlet port, then the getter pump function is achieved, but the axial length of the inlet port is increased
Solution Approach 1:
The patent changes the spatial arrangement from axial placement (increasing length) to radial placement (utilizing radius). The gas absorbing substance is positioned radially outward from the inlet port center, and the heater portion is wrapped around the gas absorbing substance in a radial configuration, allowing the getter pump function to be achieved without extending the axial length of the inlet port.
Solution Approach 2:
The patent implements a nested structure where the heater portion is wrapped around the gas absorbing substance, which is positioned within the inlet port. This nested arrangement allows both components to occupy the same radial space efficiently, achieving the getter pump function without increasing the overall axial length of the inlet port assembly.
2Reliability
If the axial length of the inlet port is increased to accommodate the gas absorbing substance, then the getter pump function is achieved, but the overall axial length of the turbomolecular pump is increased
Solution Approach 1:
The patent transitions from axial arrangement to radial arrangement of the getter pump components. By positioning the gas absorbing substance and heater portion in the radial direction rather than the axial direction, the inlet port's radial dimension is utilized instead of its axial dimension, thereby achieving the getter pump function without increasing the overall axial length of the turbomolecular pump.
3Quantity of substance
If a serpentine plate configuration is used for the gas absorbing metal portion, then the gas absorbing surface area is increased, but the axial length is increased
Solution Approach 1:
The patent abandons the serpentine plate configuration that extends axially and instead positions the gas absorbing substance in a radial arrangement within the inlet port. The heater portion is wrapped around this radially positioned substance, creating a compact configuration that provides sufficient gas absorbing surface area without increasing the axial length of the inlet port.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for the integration of a gas absorbing substance without enlarging the inlet port, facilitating easy addition of the getter pump function to existing turbomolecular pumps without space constraints.
Implementation Method 1
a heater portion configured to perform at least one of activation and regeneration of a gas absorbing substance of the getter pump portion
Data Source
AI summary
A turbomolecular pump is obtained in which a gas absorbing substance is placed without increasing the axial length of an inlet port due to the gas absorbing substance. The turbomolecular pump includes a rotor portion and a stator portion in a casing (outer cylinder 127). The turbomolecular pump includes a getter pump portion, which is placed in the stator portion or the casing, and a heater portion 402, which performs at least one of activation and regeneration of a gas absorbing substance 401 of the getter pump portion.