Turbomolecular Pump Protective Device for Particle Ingress
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Solution Overview
Problem
Turbomolecular vacuum pumps are vulnerable to damage from particles entering the intake area due to the inability to install protective grids with conventional centering rings on various flange types, leading to potential severe damage or destruction.
Innovation Solution
A protective device is integrated into the bearing support holder of the vacuum pump, featuring a grid structure with reinforced areas and adjustable geometry for secure attachment, eliminating the need for a separate protective grille component and accommodating different flange types.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a protective grid is installed in the intake area, then particle ingress is prevented, but the grid may obstruct flow and reduce pump efficiency
Solution Approach 1:
The protective device features a grid structure with varying mesh densities in different regions. The grid has larger openings in areas where particle protection is less critical and smaller openings where protection is more important, optimizing the balance between protection and flow efficiency locally across the intake area.
Solution Approach 2:
The protective device uses a grid structure with controlled porosity that allows sufficient gas flow while blocking particles. The specific mesh design and spacing create an optimal balance between particle filtration and maintaining pump performance by minimizing flow resistance.
2Reliability
If a protective grid is integrated into a centering ring, then protection is provided, but compatibility with various flange types is limited
Solution Approach 1:
The protective device is designed as a universal component that can be installed on various flange types through adaptive mounting mechanisms. The device incorporates adjustable mounting brackets and universal coupling interfaces that accommodate different flange configurations, making it compatible with both ISO and non-ISO flange standards.
Solution Approach 2:
The mounting system of the protective device includes adjustable and adaptable elements that can be configured for different flange types. The device can be dynamically adapted to various installations through adjustable positioning mechanisms and flexible mounting options, ensuring universal compatibility.
3Reliability
If a separate protective grille component is provided, then protection is achieved, but device complexity and installation requirements increase
Solution Approach 1:
The protective device is integrated directly into the bearing support holder structure, combining the protective function with an existing structural component. This merging eliminates the need for separate protective grille components and reduces the overall number of parts, simplifying both the device structure and installation process.
Solution Approach 2:
The bearing support holder serves dual functions: providing mechanical support for the shaft bearing and housing the protective device. This self-service approach allows the existing structural component to additionally provide particle protection without requiring separate dedicated protective components.
Data Source
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AI summary
The present invention relates to a vacuum pump, in particular a turbomolecular pump, comprising a housing, a rotatably mounted shaft for at least one pumping stage, and a bracket located in an intake area of the vacuum pump for a bearing to support the shaft. Furthermore, a protective device preventing the ingress of objects into the intake area is provided and is attached to the bracket.