Turbomolecular Pump Stator Disk Layout for Inlet Flow Loss Reduction
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Solution Overview
Problem
Turbomolecular vacuum pumps face limitations in achieving high pumping speed due to restricted installation space near the pump inlet, which hinders optimal positioning of the rotor-stator assembly, leading to increased flow losses.
Innovation Solution
The design of the stator disk with an axially spaced mounting plane allows the blade plane to be positioned closer to the pump inlet, reducing flow losses and improving pumping speed without altering the geometry of the inlet area, by using a mounting section that extends from the blade plane to a separate mounting plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the rotor-stator assembly is positioned as close as possible to the pump inlet to maximize pumping speed, then the pumping speed is improved, but the installation space requirements cannot be met due to flange and tool access constraints
Solution Approach 1:
The invention separates the blade plane and mounting plane axially, creating a multi-dimensional configuration where the stator disk's functional surface (blade plane) is decoupled from its mounting surface (mounting plane). This allows the blade plane to be positioned closer to the pump inlet while the mounting plane remains at a sufficient distance for flange and tool access, effectively resolving the spatial conflict by utilizing the axial dimension independently for both functions.
Solution Approach 2:
The stator disk is segmented into distinct functional zones: a blade plane for pumping action and a mounting plane for mechanical attachment. This segmentation allows each plane to be optimized independently - the blade plane can be positioned to maximize pumping speed while the mounting plane is positioned to satisfy installation space requirements for flanges and tightening tools.
2Productivity
If the outer diameter of the first stator disk is maximized relative to the pump housing inner diameter to improve pumping speed, then the pumping speed is improved, but the installation space near the pump inlet is reduced
Solution Approach 1:
By introducing an axial offset between the blade plane and mounting plane, the invention allows the stator disk to extend radially to a larger diameter without compromising the axial clearance needed for pump inlet operations. The functional blade area can maximize the housing cross-section while the mounting interface remains accessible, resolving the area conflict through axial separation.
3Loss of energy
If the first stator disk is positioned closer to the pump inlet to reduce flow losses, then the pumping speed is improved, but the mounting space for connecting elements is insufficient
Solution Approach 1:
The invention resolves the conflict between minimizing flow losses and providing mounting space by separating these two requirements into different axial positions. The blade plane is positioned close to the pump inlet to minimize flow path and reduce losses, while the mounting plane is positioned farther away to provide adequate space for flanges and tightening tools, effectively using axial dimensionality to satisfy both constraints simultaneously.
Data Source
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AI summary
A turbomolecular vacuum pump comprises a stator, at least one rotor with a plurality of circumferentially distributed rotor blades which can be driven to rotate about an axis of rotation in order to generate a pumping action, and at least one stator disk attached to the stator which cooperates with the rotor to generate the pumping action and comprises a plurality of circumferentially distributed stator blades which define a blade plane, wherein the stator disk for attachment to the stator comprises a mounting section with an end section by which the stator disk is attached to the stator and which defines a mounting plane, and wherein the blade plane and the mounting plane are perpendicular to the axis of rotation and spaced apart from each other along the axis of rotation.