Compact Turntable Processing Apparatus with Shared Support Columns
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Solution Overview
Problem
Existing processing apparatuses for semiconductor and optical device wafers are large in size due to the need for multiple grinding and polishing stations, leading to increased equipment costs and space requirements.
Innovation Solution
A compact processing apparatus with a turntable and multiple chuck tables arranged in a regular polygon pattern, featuring four processing means - coarse grinding, semifinish grinding, finish grinding, and polishing - supported by a minimal area configuration of columns and guide grooves, allowing for efficient movement and operation of these stations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If four processing means (coarse grinding, semifinish grinding, finish grinding, and polishing) are provided along the outer circumference of the turn table, then the processing capability is improved, but the apparatus becomes large in size and requires large installation area
Solution Approach 1:
The patent merges the support structures of the four processing means by arranging their support columns at the corners of a single square support bed, rather than providing separate support structures for each processing station. This consolidation reduces the overall apparatus size and installation area while maintaining all four processing capabilities.
2Manufacturing precision
If multiple grinding and polishing stations are provided, then processing accuracy is improved, but equipment cost increases
Solution Approach 1:
The patent combines multiple processing functions (coarse grinding, semifinish grinding, finish grinding, and polishing) into a single integrated turn table apparatus with shared support structures and a common control system, reducing equipment complexity and cost while preserving all necessary processing stages for high accuracy.
Solution Approach 2:
The turn table and its support structure serve multiple functions by accommodating all four processing means, allowing a single apparatus to perform the complete sequence of grinding and polishing operations that would otherwise require separate equipment, thereby reducing overall equipment cost while maintaining processing accuracy.
Data Source
AI summary
A processing apparatus includes a turn table rotatably provided and having an opening; at least five chuck tables provided on the turn table, each chuck table having a holding surface for holding a workpiece; a support bed inserted through the opening of the turn table; four processing unit supporting mechanisms each including a first support column provided on the outside of the turn table, a second support column provided on the support bed, and a support member mounted to the first and second support columns; four processing units respectively supported by the four processing unit supporting mechanisms, the four processing units respectively corresponding to four of the at least five chuck tables; and four feeding units for respectively moving the four processing units in a direction perpendicular to the holding surfaces of the chuck tables.