TVS Protection Structure Using Punch-Through for Low Trigger Voltage

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing transient-voltage-suppression protection devices have complex processes and high trigger voltages, making them inadequate for effectively protecting back-end ICs from electrostatic discharge (ESD) and electrical overstress (EOS) in advanced electronic products.

Innovation Solution

A transient-voltage-suppression protection device is designed with a substrate or epitaxial layer featuring two open-base triodes connected in series, where the first and second traps have opposite doping types to the substrate or epitaxial layer, allowing for lower voltage triggering and reduced capacitance through semiconductor punch-through characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If existing low-capacitance TVS products are used, then capacitance is reduced, but the process becomes complex and trigger voltage increases

Engineering Contradiction:
ImprovecapacitanceVSAvoidprocess complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The TVS device is segmented into two separate trap structures (first trap and second trap) with distinct injection regions, allowing independent optimization of each segment's electrical characteristics while sharing a common substrate, thereby reducing overall capacitance without excessive process complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the device are assigned different doping types and concentrations: the substrate has one doping type, while the traps have opposite doping types, creating localized electrical properties that optimize both capacitance reduction and process simplicity in different areas of the device

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If existing low-capacitance TVS products are used, then capacitance is reduced, but trigger voltage becomes higher

Engineering Contradiction:
ImprovecapacitanceVSAvoidtrigger voltage
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The doping concentration parameters are specifically optimized: traps are doped at 1×10^13 to 3×10^14 atoms/cm³ while injection regions are doped at 3×10^15 to 8×10^15 atoms/cm³, creating a parameter configuration that achieves low capacitance with reduced trigger voltage through controlled electrical field distribution

Inventive Principle:
Principle #35Parameter changes

3Quantity of substance

If two open-base triodes with common collector are connected in series, then capacitance is reduced by half, but manufacturing precision requirements increase

Engineering Contradiction:
ImprovecapacitanceVSAvoidjunction depth consistency
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The common collector substrate serves as an equipotential reference for both triodes, ensuring symmetric electrical characteristics and reducing the impact of manufacturing variations on overall device performance, thereby maintaining capacitance reduction while managing precision requirements

Inventive Principle:
Principle #12Equipotentiality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the device to trigger protection at a lower voltage, reducing capacitance by half while enhancing anti-surge and electrostatic capacity, thus improving tolerance to ESD and EOS in electronic products.

Implementation Method 1

allowing for lower voltage triggering and reduced capacitance through semiconductor punch-through characteristics

Methodology Applied
Scientific EffectSemiconductor punch-through characteristics:

Data Source

PatentUS11990505B2Transient-voltage-suppression protection device, manufacturing process and electronic product
Publication Date: 2024.05.21 WILL SEMICON (SHANGHAI) CO LTD
  • US11990505B2 patent drawing
  • US11990505B2 patent drawing

AI summary

A transient-voltage-suppression protection device and a manufacturing process therefor, and an electronic product. The transient-voltage-suppression protection device includes a substrate, a first trap, a second trap, a first injection region, and a second injection region, where the first trap and the second trap are sequentially arranged on the substrate from left to right at an interval, have a same doping type that is opposite to a doping type of the substrate, and are respectively provided with the first injection region and the second injection region with opposite doping types. The electronic product includes the transient-voltage-suppression protection device. In the solutions described, protection can be triggered and started at a lower voltage; the capacitance is small, and the manufacturing process is simple.