Two-Axis Micromirror Angle Detection With Phase Integration

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Solution Overview

Problem

The detection accuracy of the angle of the mirror portion around the first and second axes in micromirror devices is compromised due to noise interference from the swing of the mirror around the orthogonal axis, affecting the precision of optical scanning devices.

Innovation Solution

An optical scanning device with a mirror portion, first and second actuators, and angle detection sensors, utilizing integrated phase delay times and binarized signals to derive accurate reference angles, suppressing noise interference and enhancing detection accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the mirror portion swings around both first and second axes simultaneously for two-dimensional scanning, then the scanning functionality is achieved, but the detection accuracy of angle sensors decreases due to noise interference from orthogonal axis swing

Engineering Contradiction:
Improvetwo-dimensional scanning capabilityVSAvoidangle detection accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent segments the detection process by separately measuring the swing angles around the first and second axes using dedicated angle detection sensors (first and second angle detection sensors). Each sensor is configured to detect swing in a specific axis direction, allowing independent measurement that prevents cross-axis noise interference from degrading detection accuracy while maintaining two-dimensional scanning capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces an intermediary processing step that calculates phase delay times between driving signals and sensor output signals. By measuring the phase delay rather than directly using raw sensor outputs, the system can distinguish between actual swing angle information and noise components, thereby maintaining detection accuracy during simultaneous two-axis operation

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If integration of phase delay time is performed multiple times (greater by natural number factor than one frame period), then noise suppression is enhanced and detection accuracy is improved, but the processing complexity and time increase

Engineering Contradiction:
Improveangle detection accuracyVSAvoidsignal processing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies periodic integration of phase delay time over multiple cycles (a natural number of times greater than one frame period). This periodic accumulation approach allows noise components to average out while reinforcing the actual signal, achieving enhanced noise suppression and detection accuracy through systematic repeated measurement and integration

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent implements feedback control by using the integrated phase delay time information to adjust and optimize the detection process. The calculated average phase delay time serves as feedback that can be used to refine angle detection, compensate for systematic errors, and improve overall measurement accuracy while managing processing complexity

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses noise-induced errors, ensuring precise angle detection and improved scanning performance by integrating phase delay times and binarizing signals to enhance detection accuracy.

Implementation Method 1

a first actuator that causes the mirror portion to swing around a first axis

Methodology Applied
Scientific EffectMechanical force: Mechanical Force

Implementation Method 2

a second actuator that causes the mirror portion to swing around a second axis

Methodology Applied
Scientific EffectMechanical force: Mechanical Force

Implementation Method 3

a mirror portion that has a reflecting surface on which an incidence ray is reflected

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

a first angle detection sensor that outputs a signal corresponding to an angle of the mirror portion around the first axis

Methodology Applied
Scientific EffectPosition detection:

Data Source

PatentUS12422666B2Optical scanning device, driving method of optical scanning device, and image drawing system
Publication Date: 2025.09.23 FUJIFILM CORP
  • US12422666B2 patent drawing
  • US12422666B2 patent drawing
  • US12422666B2 patent drawing

AI summary

A driving controller derives a first integrated value by integrating a first phase delay time of an output signal of a first angle detection sensor with respect to a first signal to be referred to corresponding to a first driving signal, the number of times that is greater by a factor of a natural number than the number of times corresponding to a period of time of one frame of a motion image to be drawn, and derives a second integrated value by integrating a second phase delay time of an output signal of a second angle detection sensor with respect to a second signal to be referred to corresponding to a second driving signal, the number of times that is greater by a factor of a natural number than the number of times corresponding to the period of time of one frame.