Two-Fluid Nozzle With Circular Liquid Discharge Openings
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional two-fluid nozzles for substrate liquid processing inefficiently disperse processing solutions, resulting in droplets with non-uniform diameters and reduced processing effectiveness, such as cleaning efficiency.
Innovation Solution
A two-fluid nozzle design featuring multiple circular liquid discharge openings arranged along a circle inside a slit-shaped gas discharge opening, with the liquid discharge openings configured to obliquely discharge the processing solution outward and the gas discharge opening positioned to create a vortex, ensuring efficient mixing and uniform droplet formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a single circular hole-shaped liquid discharge portion is used, then the structure is simple, but the processing solution is not efficiently dispersed and droplet uniformity deteriorates
Solution Approach 1:
The single circular liquid discharge portion is divided into multiple liquid discharge openings (e.g., 6 openings) arranged along a circle. Each opening independently discharges processing solution that is then dispersed by gas to form uniform droplets. This segmentation prevents merging of liquid flows and ensures consistent droplet formation across all discharge points.
2Volume of moving object
If liquid discharge openings are positioned close together, then the nozzle structure is compact, but discharged liquid streams contact and merge reducing dispersion efficiency
Solution Approach 1:
The liquid discharge openings are positioned at specific intervals along the circular path, with each opening having an optimized distance from adjacent openings. This local spacing arrangement ensures that liquid streams discharged from different openings do not contact or merge, maintaining dispersion efficiency while keeping the nozzle structure compact.
3Stability of the object's composition
If the liquid discharge portion is positioned far from the gas discharge opening, then liquid and gas mixing is thorough, but the nozzle structure becomes complex and droplet formation distance increases
Solution Approach 1:
The liquid discharge openings are arranged in a circular pattern at a optimized distance from the gas discharge opening, creating a three-dimensional mixing zone. This circular arrangement allows liquid streams to be dispersed by gas from multiple directions simultaneously, achieving thorough mixing and uniform droplet formation without requiring excessive spacing that would increase structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the uniformity and efficiency of droplet formation, improving the liquid processing effect by preventing droplet merging and ensuring consistent collision with the gas, thereby improving processing efficiency and coverage on substrates.
Implementation Method 1
the gas discharge opening configured to discharge the gas in a downward direction... a vortex flow generating unit configured to discharge the gas from the gas discharge opening while generating a vortex of the gas
Implementation Method 2
The processing solution and the gas are mixed at an outside of (under) the two-fluid nozzle. The processing solution is dispersed due to a discharging pressure of the gas, so that the droplets of the processing solution are formed
Data Source
AI summary
A two-fluid nozzle 34 for spraying, toward a processing target object, droplets of a processing solution which are formed by mixing the processing solution discharged from a liquid discharge portion 48 and a gas discharged from a gas discharge opening 52 can uniformly spray the droplets of the processing solution having small diameters. Here, the liquid discharge portion 48 includes a multiple number of liquid discharge openings 47 arranged along a circle inside the gas discharge opening 52, and the multiple number of liquid discharge openings 47 discharge the processing solution in an outward direction of the circle.