Two-Layer Bank Structure for Film Pattern Formation
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Solution Overview
Problem
The existing methods for forming film patterns in semiconductor devices using inorganic banks are costly due to the high expense of inorganic materials, leading to increased manufacturing costs for semiconductor devices.
Innovation Solution
A method involving the use of a two-layer bank structure, where the first bank layer is made of an organic material and the second bank layer is a fluorine resin material with lyophobic properties, allowing for efficient disposition and spreading of functional liquids, and enabling the formation of multilayered film patterns with reduced processing time and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If inorganic materials are used to form banks, then heat resistance is improved, but manufacturing cost increases
Solution Approach 1:
The bank structure is divided into two separate layers: a lower bank layer made of organic material and an upper bank layer made of inorganic material. This segmentation allows each layer to fulfill different functions - the lower layer provides structural support and cost-effectiveness, while the upper layer provides the necessary heat resistance and lyophobic properties for functional liquid disposition.
Solution Approach 2:
The invention uses a composite structure combining organic and inorganic materials in a layered configuration. The lower bank layer uses organic material (such as photoresist) while the upper bank layer uses inorganic material (such as silicon oxide or silicon nitride), creating a composite system that balances cost, heat resistance, and functional liquid repellency.
2Temperature
If inorganic materials are used for banks, then heat resistance is improved, but manufacturing cost of semiconductor device increases
Solution Approach 1:
The bank structure is divided into two separate layers: a lower bank layer made of organic material and an upper bank layer made of inorganic material. This segmentation allows each layer to fulfill different functions - the lower layer provides structural support and cost-effectiveness, while the upper layer provides the necessary heat resistance and lyophobic properties for functional liquid disposition.
Solution Approach 2:
The invention uses a composite structure combining organic and inorganic materials in a layered configuration. The lower bank layer uses organic material (such as photoresist) while the upper bank layer uses inorganic material (such as silicon oxide or silicon nitride), creating a composite system that balances cost, heat resistance, and functional liquid repellency.
3Ease of manufacture
If organic material is used for bank, then manufacturing cost is reduced, but lyophobicity of bank surface decreases
Solution Approach 1:
The bank structure is divided into two separate layers: a lower bank layer made of organic material and an upper bank layer made of inorganic material. This segmentation allows each layer to fulfill different functions - the lower layer provides structural support and cost-effectiveness, while the upper layer provides the necessary heat resistance and lyophobic properties for functional liquid disposition.
Solution Approach 2:
The invention uses a composite structure combining organic and inorganic materials in a layered configuration. The lower bank layer uses organic material (such as photoresist) while the upper bank layer uses inorganic material (such as silicon oxide or silicon nitride), creating a composite system that balances cost, heat resistance, and functional liquid repellency.
4Reliability
If plasma treatment is applied to bank surface, then lyophobicity is improved, but processing time and complexity increase
Solution Approach 1:
The lyophobic properties are built into the bank structure during the formation process by adding an upper bank layer with inherent lyophobic characteristics. This preliminary incorporation of the desired property eliminates the need for subsequent plasma treatment steps, reducing processing time and complexity while maintaining effective liquid repellency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces manufacturing costs by utilizing less expensive organic materials, enhances the lyophobicity of the bank surface, and allows for the formation of thicker, uniformly deposited film patterns with increased manufacturing efficiency.
Implementation Method 1
the second bank layer is made of a fluorine resin material covering the first bank layer... the second bank layer formed on the top of the layers is made of a fluorine resin material having lyophobicity
Data Source
AI summary
A method for forming a film pattern by disposing a functional liquid in a pattern forming region partitioned by a bank includes: disposing a first bank forming material to a substrate so as to form a first bank layer; and forming a second bank layer on the first bank layer, wherein the first bank forming material is an organic material while the second bank layer is made of a fluorine resin material covering the first bank layer.