Two-Modulus Imprint Mold With Inorganic Film for Foreign-Substance Adaptation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing imprint techniques face challenges with expensive master molds and replica molds breaking due to foreign substances on substrates, leading to non-contact regions and pattern transfer failures, while using inexpensive organic materials risks adhesive issues with curable compositions.
Innovation Solution
A mold design incorporating high and low elastic modulus parts, with a specific thickness range and an inorganic film, enhances pattern transfer by adapting to foreign substances and preventing mold breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a replica mold is made of silica glass with high elastic modulus, then the mold has high strength and resistance to breakage, but the mold cannot adapt to foreign substances on substrates causing non-contact regions and pattern transfer failures
Solution Approach 1:
The mold is divided into two distinct parts: a base portion made of silica glass providing structural strength, and a pattern portion made of organic material providing adaptability. This segmentation allows each part to fulfill its specific function without compromise.
Solution Approach 2:
The mold combines two different materials (silica glass and organic material) with different elastic moduli into a single composite structure. The base portion uses high elastic modulus silica glass for strength, while the pattern portion uses low elastic modulus organic material for adaptability to foreign substances.
2Adaptability or versatility
If a replica mold is made of organic material with low elastic modulus, then the mold can adapt to foreign substances, but the curable composition adheres to the mold causing contamination
Solution Approach 1:
The mold is divided into a base portion and a pattern portion, separating the structural support function from the pattern transfer function. This allows the pattern portion to be made of organic material for adaptability while the base portion provides structural integrity.
Solution Approach 2:
Different parts of the mold have different material properties tailored to their specific functions. The base portion has high elastic modulus for strength, while the pattern portion has low elastic modulus for adaptability. The inorganic film is applied locally to the pattern portion to prevent adhesion.
3Manufacturing precision
If a master mold is used for precision pattern formation, then the pattern transfer precision is high, but the manufacturing cost is very expensive
Solution Approach 1:
Instead of directly using an expensive master mold, the invention creates a replica mold by transferring the pattern from the master mold to a mold base material through imprint processing and etching. This copying process allows the expensive master mold to be used once to create multiple cheaper replica molds.
Solution Approach 2:
The expensive master mold is used to create the pattern on the replica mold, after which the master mold's primary function is complete. The replica mold then serves as the working tool for multiple imprint operations, effectively recovering and reusing the pattern information without repeatedly exposing the master mold to wear and damage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The mold design effectively transfers patterns despite foreign substances, reducing non-contact regions and mold breakage, while maintaining cost-effectiveness.
Implementation Method 1
the mold includes an inorganic film that covers the fourth surface of the base portion and the convex portion of the pattern portion
Implementation Method 2
a second part made of a material having a second elastic modulus lower than the first elastic modulus... a base portion including a third surface combined to the mesa portion and a fourth surface on an opposite side of the third surface
Data Source
AI summary
A mold including a first part made of a material having a first elastic modulus, and a second part made of a material having a second elastic modulus lower than the first elastic modulus, wherein the first part includes a first surface including a mesa portion and a second surface which includes a concave portion, the second part includes a base portion including a third surface combined to the mesa portion and a fourth surface, and a pattern portion that includes a convex portion defining a pattern, a thickness of the base portion defined by a distance between the third surface and the fourth surface is not less than 0.1 μm and not more than 10 μm, and the mold includes an inorganic film that covers the fourth surface of the base portion and the convex portion of the pattern portion.