Two-Phase Cooling With Assisted Condensation for Semiconductor Heat Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Semiconductor devices face challenges in thermal management due to heat dissipation issues, which can impact performance and require efficient cooling methods to maintain optimal operating conditions during testing and operation.

Innovation Solution

A fluid-based multi-phase cooling system with assisted condensation is employed, utilizing a thermal management system that includes heating and cooling units, fluid reservoirs, and condensation conduits to regulate temperature and pressure independently in thermal test chambers and semiconductor device systems, using fluids like water or hydrofluoroether to manage heat and vapor condensation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If air cooling or liquid cooling is used to dissipate heat from semiconductor devices, then heat dissipation is achieved, but thermal management effectiveness is insufficient for high-performance devices

Engineering Contradiction:
Improveheat dissipationVSAvoidthermal management effectiveness
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent employs two-phase cooling where a working fluid undergoes phase transition from liquid to vapor in the evaporator section, absorbing latent heat from the semiconductor device. This phase change mechanism provides significantly higher heat dissipation capacity compared to single-phase liquid cooling, directly resolving the thermal management effectiveness issue for high-performance devices.

Inventive Principle:
Principle #36Phase transitions

Solution Approach 2:

The system dynamically adjusts operating parameters including fluid flow rate, condensation temperature, and pressure conditions to optimize heat dissipation performance. By changing these parameters, the system adapts to different thermal loads and maintains optimal thermal management effectiveness across varying operating conditions.

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If conventional cooling systems are used, then simple structure is maintained, but independent control of temperature and pressure is not achieved

Engineering Contradiction:
ImprovestructureVSAvoidindependent control of temperature and pressure
Core Design Contradiction:
Device complexityVSEase of operation

Solution Approach 1:

The cooling system is divided into functionally independent sections: an evaporator section for temperature control and a condenser section for pressure control. This segmentation allows each section to be optimized and controlled independently, enabling simultaneous independent adjustment of temperature and pressure parameters without requiring complex integrated control mechanisms.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a condensation section as an intermediary component between the evaporator and the environment. This intermediary enables decoupled control by providing a dedicated mechanism for pressure regulation through condensation control, while temperature is managed in the evaporator section, thus achieving independent control without proportionally increasing overall system complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Temperature

If vapor is generated in thermal test chambers, then heating function is achieved, but vapor pressure impacts the thermal test chamber and semiconductor device system

Engineering Contradiction:
Improveheating functionVSAvoidvapor pressure impact
Core Design Contradiction:
TemperatureVSStress or pressure

Solution Approach 1:

The patent converts the harmful vapor pressure into a beneficial mechanism by implementing a condensation section that deliberately condenses the vapor. The condensation process not only removes the harmful pressure buildup but also recovers latent heat, transforming the previously problematic vapor into a useful thermal management resource that enhances overall system efficiency.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The system utilizes controlled phase transition from vapor to liquid in the condensation section to manage vapor pressure. By facilitating this phase change, the system effectively removes excess vapor pressure from the thermal test chamber while simultaneously recovering thermal energy, thus eliminating the harmful effect while maintaining the beneficial heating function.

Inventive Principle:
Principle #36Phase transitions

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively controls temperature and pressure variations, ensuring reliable performance of semiconductor devices by maintaining desired operating conditions and reducing the impact of vapor pressure on thermal test chambers and semiconductor device systems.

Implementation Method 1

a cooling unit that is capable of cooling a fluid

Methodology Applied
Scientific EffectCooling: Cooling

Implementation Method 2

In operation, the cooling unit can cool the fluid to a temperature that is less than the saturation temperature of the fluid at a system pressure

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 3

Semiconductor chips are central to intelligent devices and systems... The operation of a semiconductor device can create heat which can be dissipated, for example, through air cooling or liquid cooling

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentEP4671778A1Two-phase cooling with assisted condensation for semiconductor devices
Publication Date: 2025.12.31 INTEL CORP
  • EP4671778A1 patent drawingFigure 1
  • EP4671778A1 patent drawingFigure 2A
  • EP4671778A1 patent drawingFigure 2B

AI summary

Systems for heat management of semiconductor systems are provided. The heat management systems can provide liquid cooling or heating for a plurality of semiconductor devices under test. The systems are also useful for liquid cooling of computing systems, such as datacenters.