Method and device for drying a component interior
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Solution Overview
Problem
Existing methods for drying component interiors in lithography apparatuses, such as the collector unit, face inefficiencies and risks of damage due to pressure buildup when using compressed air, and inaccuracies in tightness testing due to residual moisture and freezing liquids.
Innovation Solution
A two-step drying method involving the admission of heated air followed by reduced pressure suction, with controlled temperature and moisture monitoring, ensuring complete removal of moisture and efficient drying.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If compressed air is blown through the component interior to dry it, then drying can be achieved, but pressure increases significantly when lines are clogged, risking component damage
Solution Approach 1:
The drying process is divided into two distinct phases: a first drying phase using compressed air to remove bulk moisture, and a second drying phase using vacuum to remove residual moisture. This segmentation allows each phase to operate under controlled conditions, preventing excessive pressure buildup while ensuring complete drying.
Solution Approach 2:
The method alternates between applying positive pressure (compressed air) and negative pressure (vacuum) in periodic cycles. The first drying step uses compressed air, then the second drying step switches to vacuum, creating a periodic action that prevents continuous pressure accumulation and ensures thorough drying without damaging the component.
2Productivity
If compressed air is used to dry the component interior, then some drying is achieved, but the drying is insufficient for accurate tightness testing
Solution Approach 1:
The drying process is segmented into two phases: first using compressed air for rapid moisture removal, then using vacuum for complete moisture extraction. This ensures that both bulk and residual moisture are removed, achieving the level of drying required for accurate tightness testing.
Solution Approach 2:
The method changes the pressure parameter from positive (compressed air) to negative (vacuum) between the two drying steps. This parameter change enables the system to first rapidly remove bulk moisture and then thoroughly extract residual moisture, ensuring complete drying for accurate measurements.
3Productivity
If the component is pumped out to dry it, then drying can be achieved, but water may freeze and plug leaks, leading to incorrect tightness assessments
Solution Approach 1:
The method uses periodic alternation between compressed air and vacuum phases. The vacuum phase removes moisture without causing freezing, and the compressed air phase warms the component interior. This periodic action prevents water from freezing and plugging leaks, ensuring reliable tightness testing.
Solution Approach 2:
The method changes temperature and pressure parameters dynamically: using compressed air (higher temperature and pressure) in the first phase to prevent freezing, then switching to vacuum (lower pressure) in the second phase for complete drying. This parameter control ensures moisture removal without freezing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Achieves thorough and reliable drying of component interiors, enabling accurate tightness testing by removing all liquid and moisture particles, thereby preventing component damage and ensuring reliable leak detection.
Implementation Method 1
a first drying step, in which simultaneously heated air is admitted (for example blown) into the component interior through an inlet and the heated air is sucked out of the component interior through an outlet
Implementation Method 2
heated air is admitted (for example blown) into the component interior
Implementation Method 3
a succeeding second drying step, in which the inlet for the heated air is closed and the air is sucked out of the component interior, as a result of which a reduced pressure is generated in the component interior
Implementation Method 4
the air is sucked out of the component interior
Data Source
AI summary
A method for drying a component interior of a component can be used in a lithographic process chain. The method includes a first drying step, in which simultaneously heated air is admitted into a component interior through an inlet, and the heated air is sucked out of the component interior through an outlet. The method also includes a succeeding second drying step, in which the inlet for the heated air is closed and the air is sucked out of the component interior, resulting in a reduced pressure is generated in the component interior.