Two-Piece Shutter Disk Assembly for Substrate Process Chamber

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Solution Overview

Problem

Conventional shutter disks in process chambers deform due to thermal mismatch and material deposition, leading to exposure of substrate supports and issues like arcing, sticking, and reduced electrostatic chucking force, despite attempts to minimize deformation with lower RF powers and cooling methods.

Innovation Solution

A two-piece shutter disk assembly with a thermally stable lower carrier member and a mechanically stiff upper disk member, featuring a stepped design and central opening with an annular ledge, which creates a protective overlap region to prevent substrate exposure during deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If shutter disk thickness and weight are minimized for robot handling, then ease of operation is improved, but the shutter disk deforms more during pasting and burn-in processes

Engineering Contradiction:

Improverobot handlingVSAvoidshutter disk deformation

Core Design Contradiction:

Ease of operationVSStability of the object's composition

Solution Approach 1:

The shutter disk is divided into two separate components: a thin upper shutter disk member for robot handling and a lower carrier member for structural support. This segmentation allows each component to be optimized for its specific function - the upper member remains thin and lightweight while the lower member provides the necessary mechanical strength and thermal stability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention uses a composite structure combining two different members made from potentially different materials. The upper shutter disk member can be made from a material optimized for thermal resistance, while the lower carrier member provides mechanical support. This composite approach allows optimization of each component for its specific requirements.

Inventive Principle:

Principle #40Composite materials

2Temperature

If lower RF powers and cooling periods are used, then thermal stress is reduced, but substrate support exposure still occurs

Engineering Contradiction:

Improvethermal stressVSAvoidsubstrate support protection

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The lower carrier member is pre-positioned below the upper shutter disk member to create an overlap region before any deformation occurs. This preliminary structural arrangement ensures that even if the upper member deforms during thermal cycling, the lower carrier member maintains the protective coverage over the substrate support.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The overlap region between the upper shutter disk member and lower carrier member acts as a pre-established protective buffer. This cushioning region is designed in advance to compensate for expected thermal deformation, ensuring continuous protection of the substrate support without requiring active control during operation.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Manufacturing precision

If shutter disk material stiffness is increased to resist deformation, then manufacturing precision is improved, but weight increases affecting robot handling

Engineering Contradiction:

Improvedeformation resistanceVSAvoidshutter disk weight

Core Design Contradiction:

Manufacturing precisionVSWeight of moving object

Solution Approach 1:

The shutter disk system is segmented into two functional parts: the upper shutter disk member which remains thin and lightweight for easy robot handling, and the lower carrier member which provides the necessary structural stiffness and deformation resistance. This segmentation decouples the conflicting requirements of weight and stiffness.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The lower carrier member acts as an intermediary structural element that provides mechanical support and thermal stability without interfering with the primary function of the upper shutter disk member. The carrier member mediates between the need for lightweight operation and the need for deformation resistance.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The assembly effectively manages disk expansion and reduces exposure of the substrate support to undesired material deposition, maintaining process chamber integrity and preventing substrate damage during conditioning operations.

Implementation Method 1

the shutter disk may develop stresses from a thermal mismatch between the top and bottom surfaces of the shutter disk, for example, causing the shutter disk to deform

Methodology Applied

Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS9252002B2Two piece shutter disk assembly for a substrate process chamber

Publication Date: 2016.02.02 APPLIED MATERIALS INC

AI summary

Shutter disk assemblies for use in process chambers to protect a substrate support disposed below the shutter disk assembly from undesired material deposition are provided herein. In some embodiments, a shutter disk assembly for use in a process chamber to protect a substrate support disposed below the shutter disk assembly may include an upper disk member having a top surface and a bottom surface; and a lower carrier member having at least a portion of the lower carrier member disposed below a portion of the upper disk member to support the upper disk member and to create a protective overlap region that prevents exposure of the substrate support upon deformation of the upper disk member.