Two-Stage Combustion System for Reducing NOx and CO Emissions
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Solution Overview
Problem
Existing waste gas burning methods in semiconductor and chemical processes generate high levels of nitrogen oxides (NOx) and carbon monoxide (CO) due to incomplete combustion and temperature-related issues, leading to environmental pollution.
Innovation Solution
A low-pollution burning method that involves individually controlling CO and NOx by introducing waste gases into a combustion system with pre-mixed combustible and support gases, utilizing multiple combustion regions to achieve complete combustion and optimize temperature conditions, thereby suppressing NOx and CO generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If waste gases are burned at high temperature in a combustion chamber, then the combustion reaction is enhanced, but NOx is rapidly generated and CO is introduced due to incomplete combustion
Solution Approach 1:
The combustion process is divided into two distinct combustion chambers: a first combustion chamber for initial combustion and a second combustion chamber for completing the combustion of unburned components. This segmentation allows each chamber to operate under optimized conditions for different combustion stages, reducing overall emissions while maintaining combustion efficiency.
Solution Approach 2:
Different combustion chambers are designed with different characteristics: the first combustion chamber has higher temperature for rapid combustion, while the second combustion chamber is designed to complete the combustion of unburned components like CO and CH4. Each chamber has localized quality differences in temperature, pressure, and gas composition to optimize specific combustion functions.
2Temperature
If temperature within the combustion chamber is increased, then NOx concentration is increased, but CO concentration is decreased
Solution Approach 1:
The system segments the combustion process into two stages with different temperature profiles. The first combustion chamber operates at high temperature to promote rapid combustion, while the second combustion chamber completes the combustion of unburned components at controlled temperatures, preventing excessive NOx generation while reducing CO emissions.
Solution Approach 2:
The invention changes combustion parameters (temperature, pressure, equivalence ratio) between the two combustion chambers. The first chamber uses higher temperature and the second chamber optimizes parameters to complete combustion of unburned components, thereby controlling NOx formation while reducing CO emissions through parameter optimization.
3Productivity
If waste gases are burned in a combustion apparatus, then combustion reaction occurs, but large amounts of NOx are generated due to oxidation of waste gases and N2 gases at high temperature
Solution Approach 1:
The combustion process is segmented into two stages: initial combustion in the first chamber and completion combustion in the second chamber. This segmentation allows the system to maintain high combustion reaction rates while controlling NOx generation by optimizing conditions in each stage separately.
Solution Approach 2:
The invention converts the harmful effect of high temperature (which causes NOx generation) into a beneficial process by using the heat from the first combustion chamber to drive the second combustion chamber, where unburned components are completely oxidized. The high temperature region is utilized efficiently while limiting overall NOx generation through controlled combustion completion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively reduces NOx and CO emissions by adjusting the equivalence ratio and temperature in each combustion region, ensuring that waste gases are burned efficiently, resulting in a significant decrease in pollutant discharge.
Implementation Method 1
generating a flame by igniting a fuel gas in which a combustible gas and a support gas are pre-mixed
Implementation Method 2
burning the waste gas in the first combustion region by the waste gas coming into contact with the flame
Implementation Method 3
inducing complete combustion by burning unburned components (CO and CH4), which remain in a waste gas moved to a second combustion region
Implementation Method 4
burning unburned components (CO and CH4) together with a support gas, which is additionally introduced into the second combustion region
Data Source
AI summary
The disclosure relates to a waste gas purification method, and more particularly, to a waste gas burning method of reducing CO and NOx by burning waste gases using a system for individually controlling CO and NOx. In accordance with the disclosure, there is provided a low-pollution burning method using a system for individually controlling CO and NOx including a waste gas introduction and flame injection step; a first waste gas burning step; and a second waste gas burning step.