Two-Stage Fluid Temperature Control for Stable Substrate Processing
Solution Overview
Problem
Existing temperature control devices for substrate processing systems face challenges in achieving accurate temperature control, often resulting in temperature fluctuations and reduced precision.
Innovation Solution
The proposed temperature control device includes a first temperature adjuster, a second temperature adjuster, a first temperature-control flow path, a second temperature-control flow path, a return flow path, and a tank, which work together to precisely control the temperature of a temperature controller by circulating a fluid through it.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a simple single-stage temperature control system is used, then the device complexity is low, but the temperature control accuracy deteriorates
Solution Approach 1:
The temperature control system is divided into two independent stages: a first temperature adjuster that cools the fluid to a first temperature, and a second temperature adjuster that heats the cooled fluid to a second temperature. This segmentation allows each stage to specialize in one temperature adjustment function, improving overall control accuracy while keeping individual components relatively simple
Solution Approach 2:
The tank serves as an intermediary component between the first and second temperature adjusters. It stores the fluid at the first temperature and provides a buffer that allows the second temperature adjuster to operate independently, preventing direct thermal interference between the two adjustment stages and thereby improving temperature control precision
2Stability of the object's composition
If a single temperature adjuster is used, then the device complexity is low, but the temperature stability deteriorates causing fluctuations
Solution Approach 1:
By separating the temperature adjustment into two independent adjusters with distinct functions (cooling and heating), the system eliminates the temperature fluctuations that occur when a single adjuster attempts to perform both functions. Each adjuster operates independently to maintain stable temperature conditions
Solution Approach 2:
The first temperature adjuster cools the fluid to a first temperature, and the tank stores this cooled fluid. The second temperature adjuster then takes this pre-cooled fluid and heats it to the desired second temperature. This self-service arrangement where each adjuster handles its specific task independently improves temperature stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the accuracy and precision of temperature control, effectively preventing temperature fluctuations and ensuring a stable temperature is maintained, even during transient states.
Implementation Method 1
a first temperature adjuster configured to control the fluid to a first temperature
Implementation Method 2
a second temperature adjuster configured to control the fluid controlled to the first temperature to a second temperature
Implementation Method 3
The temperature control device includes... a pump configured to circulate the fluid
Implementation Method 4
The temperature control device includes... a heat exchanger configured to heat the temperature controller by using the fluid
Data Source
AI summary
To provide a temperature control device, a substrate processing apparatus, and a temperature control method that improve accuracy and responsiveness of temperature control. The temperature control device for controlling a temperature of a temperature controller by circulating a fluid through the temperature controller, includes: a first temperature adjuster for controlling the fluid to a first temperature, a second temperature adjuster for controlling the fluid controlled to the first temperature to a second temperature, a first temperature-control flow path provided between the first temperature adjuster and the second temperature adjuster, a second temperature-control flow path provided between the second temperature adjuster and the temperature controller, and a return flow path provided between the temperature controller and the first temperature adjuster.