Two-Way Gate Valve Segmented Blades for Vacuum Integrity
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Solution Overview
Problem
Existing gate valves in semiconductor manufacturing processes face issues with mechanical defects leading to operational failures and uneven movement due to lack of alternative opening/closing units and vertical movement guidance, disrupting the vacuum state and maintenance processes.
Innovation Solution
A two-way gate valve design featuring independently operable first and second blades, L-motion block, and moving unit with rollers and guide grooves, allowing for smooth vertical and horizontal movement and continuous operation even if one blade is defective, with sealing plates that expand and contract to maintain vacuum integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single blade is used to open/close the gate valve, then the structure is simple, but the reliability is low because mechanical defects cause operational failures
Solution Approach 1:
The gate valve is divided into two independent blades (first blade and second blade) instead of using a single blade. Each blade can be operated independently to open or close the moving path, ensuring that if one blade fails due to mechanical defects, the other blade can still perform the closing function to maintain vacuum integrity.
2Manufacturing precision
If no vertical movement guidance is provided for the shaft, then the structure is simpler, but the movement precision deteriorates causing uneven blade movement
Solution Approach 1:
A guide groove is introduced as an intermediary element between the shaft and the housing. The guide groove receives the shaft and guides its vertical movement, ensuring that the shaft moves uniformly without lateral deviation. This intermediary structure resolves the contradiction by providing precise movement guidance while maintaining relatively simple overall structure.
3Ease of repair
If alternative opening/closing units are not provided, then the device complexity is low, but the ease of repair deteriorates when mechanical defects occur
Solution Approach 1:
The operating units are segmented into two independent systems (first operating unit for first blade, second operating unit for second blade). This segmentation allows one blade to be repaired or maintained while the other blade continues to operate, improving ease of repair without requiring complete system shutdown or complex interdependent mechanisms.
4Reliability
If sealing plates are not made expandable, then the structure is simpler, but the vacuum sealing reliability deteriorates
Solution Approach 1:
The sealing plates are designed to be dynamically expandable rather than statically fixed. When the blade moves to close the moving path, the sealing plates expand outward to ensure tight contact with the seat, enhancing vacuum sealing reliability. This dynamic adaptation resolves the contradiction by providing reliable sealing without requiring overly complex multi-component sealing systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures continuous operation and easy repair of the first blade while maintaining the vacuum state by allowing the second blade to operate independently, ensuring precise and reliable movement and sealing of the gate valve paths.
Implementation Method 1
a first roller (510) inserted into the rotation guide groove (410) on each of both upper portions of the L-motion block (500)... a second roller (531) inserted into the L-motion block moving groove (420) on each of both side surfaces of the L-motion block (500)
Data Source
AI summary
Disclosed herein is an upper housing 100 having openings that are respectively defined in a front surface and a rear surface thereof and in which first and second moving paths 110 and 120 are defined; a first blade 200 installed in the upper housing 100 to move upward from a lower side, thereby opening/closing the first moving path 110; a first shaft 300 coupled to a lower portion of the first blade 200; a lower housing 400 disposed below the upper housing 100, in which a rotation guide groove 410 for guiding rotation of a L-motion block 500 at a fixed position while the first blade 200 moves in a close direction C is defined in each of both inner surfaces of the lower housing (400).