Two Zone Flow Cooling Plate for Gas Distribution Assembly
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Solution Overview
Problem
Conventional showerhead assemblies in semiconductor processing chambers fail to maintain temperature uniformity, leading to radial profile variations in deposited substrate films, especially at lower power loads, which affects plasma processing uniformity.
Innovation Solution
A cooling plate with radially segmented channels for flow tuneability and counter-flow action is introduced to enhance heat transfer and temperature uniformity, featuring spheroidal channel arrangements for maximum heat transfer area, reducing the overall thickness while improving thermal performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional cooling plate design is used, then device complexity is low, but temperature uniformity deteriorates
Solution Approach 1:
The cooling plate is divided into multiple cooling zones with radially segmented channels, allowing independent temperature control in different regions to achieve uniform temperature distribution across the gas distribution plate
Solution Approach 2:
Spheroidal or curved channel arrangements are used instead of straight channels to maximize heat transfer surface area and optimize thermal performance while maintaining compact design
2Length of stationary object
If cooling plate thickness is reduced, then device size is minimized, but heat transfer efficiency deteriorates
Solution Approach 1:
The cooling channels are designed with complex three-dimensional paths including radial and axial components, allowing efficient heat transfer in a thinner plate by utilizing multiple spatial dimensions for heat removal
Solution Approach 2:
Curved and spheroidal channel geometries increase the effective heat transfer surface area within the reduced thickness, compensating for the smaller volume through optimized surface-to-volume ratio
3Adaptability or versatility
If single-zone cooling is used, then device complexity is low, but ability to handle differentiated heat load requirements deteriorates
Solution Approach 1:
The cooling system is segmented into multiple independent cooling zones that can be individually controlled to match differentiated heat load requirements in different regions of the gas distribution plate
Solution Approach 2:
Each cooling zone is designed with specific channel configurations and flow rates tailored to the local heat generation characteristics, providing optimized cooling where needed most
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves temperature uniformity across the gas distribution plate to within ±3°C, significantly better than conventional designs, and provides improved thermal performance, enhancing plasma processing uniformity and handling differentiated heat load requirements.
Implementation Method 1
A plurality of channels formed through the top surface. The plurality of channels having a first outer channel having one or more first outer channel segments configured for flowing a first cooling fluid from a cooling fluid inlet to a cooling fluid outlet
Implementation Method 2
a first inner channel disposed between the first outer channel and the center having one or more first inner channel segments configured for flowing a second cooling fluid from a cooling fluid inlet to a cooling fluid outlet wherein flow in adjacent segments is in an opposite direction
Data Source
AI summary
An apparatus and method for cooling a gas distribution assembly with a cooling plate. The cooling plate having a body having a top surface, an outer perimeter, a center, an inner zone and an outer zone. A plurality of channels formed through the top surface. The plurality of channels having a first outer channel having one or more first outer channel segments configured for flowing a first cooling fluid from a cooling fluid inlet to a cooling fluid outlet and a first inner channel disposed between the first outer channel and the center having one or more first inner channel segments configured for flowing a second cooling fluid from a cooling fluid inlet to a cooling fluid outlet wherein flow in adjacent segments is in an opposite direction.