U-Motion Gate Valve Lever Sealing Against Bellows Repulsive Force
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Solution Overview
Problem
Gate valves in semiconductor manufacturing experience incomplete sealing due to lateral deflection of bellows, resulting in repulsive forces that prevent a tight seal, especially when made of SUS material.
Innovation Solution
A U Motion gate valve design utilizing the principle of a class 3 lever, where the fulcrum point is at the end of the main shaft, the force point at the center, and the applying point at the tip, with a support block and height adjustment mechanism to offset repulsive forces and ensure a tight seal by supporting the main shaft's end on the inner surface of the second passing hole.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the bellows is made of SUS material to ensure corrosion resistance, then the valve can withstand corrosive fluids, but lateral deflection occurs during operation causing incomplete sealing
Solution Approach 1:
The patent introduces a guide plate as an intermediary component between the bellows and the sealing plate. The guide plate has a guide groove that constrains the bellows to move only in the vertical direction, preventing lateral deflection. This mediator resolves the contradiction by allowing the SUS bellows to maintain its corrosion resistance while eliminating the lateral movement that caused sealing failures.
2Stability of the object's composition
If the bellows tip is fixedly coupled to the drive part to prevent movement, then structural stability is improved, but lateral deflection occurs generating repulsive force that prevents complete sealing
Solution Approach 1:
The guide plate serves as a mediator between the fixed drive part and the movable bellows. It provides a guided path that allows the bellows to move vertically while preventing lateral deflection, thus maintaining both structural stability and sealing precision without generating repulsive forces.
Solution Approach 2:
The patent transitions from a completely fixed coupling to a dynamically constrained coupling. The bellows is allowed to move vertically along the guide groove while its lateral movement is constrained. This dynamic approach maintains structural stability while enabling the necessary movement for sealing operation without lateral deflection.
3Strength
If the sealing plate is subjected to repulsive force from lateral deflection, then the bellows material resists deformation, but the sealing operation is not completely performed
Solution Approach 1:
The guide plate acts as a mediator that redirects the forces acting on the bellows. By providing a constrained vertical path, it ensures that the repulsive force from bellows resistance is directed vertically rather than laterally, allowing the sealing plate to apply full sealing force without being counteracted by lateral deflection forces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The U Motion gate valve effectively maintains a tight closed state by offsetting the repulsive force of the bellows, ensuring reliable sealing performance and extending the valve's lifespan by minimizing contact with corrosive fluids.
Implementation Method 1
a bellows (400) formed on the front of the movement guide sheet (300)
Implementation Method 2
when closing the valve with U Motion operation using the principle of the class 3 lever, it is configured such that a fulcrum point acts at the end of the main shaft, a force point acts at the center of the main shaft, and a applying point acts at the tip of the main shaft to seal the outlet
Data Source
AI summary
The present invention relates to a U Motion gate valve that maintains a tight seal on the outlet side when closing the valve through U Motion operation in the state that the tip and end of the main shaft are free ends using the principle of the class 3 lever.