U-Tube Drain Pipe Prevents NH4Cl Crystallization in Semiconductor Exhaust
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Solution Overview
Problem
Current semiconductor process exhaust pipes experience congestion due to NH4Cl crystallization, leading to pressure surges and machinery shutdowns, requiring costly and time-consuming disassembly for clearance.
Innovation Solution
A gas-liquid separation system with a T-shaped conduit and U-tube drain pipe design, where waste water acts as a blocking agent to prevent exhaust gas interaction, allowing for effective separation and preventing crystallization through structural design and the U-tube principle.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If exhaust gas and waste liquid are transported through the same pipe, then the pipe structure is simple, but crystallization occurs causing pipe congestion and pressure surge
Solution Approach 1:
The exhaust system is segmented into separate gas and liquid transport pathways. The gas-liquid separation conduit divides the flow into a gas outlet connected to the exhaust gas pipe and a liquid outlet connected to the drain pipe, preventing mixed transport that causes crystallization while maintaining overall system simplicity
Solution Approach 2:
The drain pipe with U-tube configuration acts as an intermediary device between the gas-liquid separation conduit and the waste water process pipe. It separates liquid waste from gas exhaust through gravitational settling and U-tube water seal mechanism, preventing crystallization in the main exhaust pathway
2Adaptability or versatility
If the pipe has multiple turns to accommodate space constraints, then installation flexibility is improved, but NH4Cl crystallizes in turns causing jamming
Solution Approach 1:
The harmful function of pipe turns (which cause crystallization and jamming) is eliminated by extracting the liquid waste transport function into a separate drain pipe with U-tube configuration. The main exhaust gas pipe can now be laid straight without turns, while installation flexibility is maintained through the separate drain pipe routing
Solution Approach 2:
The U-tube drain pipe utilizes hydraulic principles where liquid waste accumulates in the U-tube bend due to gravity, creating a water seal that prevents exhaust gas from entering the drain pipe while allowing liquid to drain. This hydraulic separation prevents crystallization in horizontal pipe sections
3Temperature
If temperature of the pipe is lower than NH4Cl dew point, then condensation occurs, but this leads to liquid formation and subsequent crystallization
Solution Approach 1:
The gas-liquid separation conduit acts as an intermediary device that separates condensed liquid from gas vapor immediately after condensation occurs. By diverting liquid through the drain pipe with U-tube configuration, the system prevents liquid NH4Cl from traveling further and crystallizing in pipe turns or blocking the exhaust system
Solution Approach 2:
The harmful liquid phase is extracted from the gas flow through the gas-liquid separation conduit and drain pipe system. This extraction prevents the liquid from causing downstream crystallization problems while allowing the gas to continue exhausting normally
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system prevents pipe congestion and pressure changes, ensuring continuous operation by separating exhaust gases and waste liquids, thereby avoiding crystallization and machinery shutdowns.
Implementation Method 1
allowing the waste water to flow along the gas-liquid separation conduit and to be temporarily stored in the drain pipe, while the temporarily stored waste water blocks the drain pipe to prevent the exhaust gas from passing through the drain pipe
Implementation Method 2
allowing the waste water to flow along the gas-liquid separation conduit and to be temporarily stored in the drain pipe
Implementation Method 3
enables separation of exhaust gas and waste water, preventing reactions of exhaust gas and waste water that may cause pipe congestion due to crystallization
Data Source
AI summary
A gas-liquid separation system and a method thereof are disclosed. The said system comprises a gas-liquid separation conduit and a drain pipe. The drain pipe is curled and one side of the drain pipe connects to the gas-liquid separation conduit and the other side connects to a sewage pipe. According to the U-Tube principle, the gas and the liquid which both are exhausted by a machinery can be separated in the said system and therefore the said system can prevent related processes causing exhaust piping jam.