Redistribution Layer UBM Layout to Reduce Package Warpage

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Solution Overview

Problem

The existing T-type under bump metallization (UBM) technology for semiconductor packages faces challenges with adhesion between the UBM and dielectric layers, leading to peeling issues and increased manufacturing time and cost, as well as warpage due to thickness differences in package-on-package structures.

Innovation Solution

The proposed solution involves replacing the conventional upper structure in T-type UBM with a horizontal UBM wire line that connects redistribution vias, reducing the number of layers and thickness of the front side redistribution layer, thereby improving adhesion and reducing manufacturing time and cost, and enhancing warpage characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If T-type UBM technology is used to improve adhesion between UBM and dielectric layer, then adhesion is improved, but manufacturing time and cost increase

Engineering Contradiction:
Improveadhesion between UBM and dielectric layerVSAvoidmanufacturing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent extracts and removes the unnecessary upper horizontal structure and additional via structures from the conventional T-type UBM configuration. By taking out these redundant elements, the patent achieves the same adhesion improvement function without the additional manufacturing steps, thereby reducing manufacturing time and cost while maintaining the core benefit of preventing UBM side surface peeling.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent makes the UBM wire line perform multiple functions: it serves as both the adhesion-improving structural element and as an electrical connection path (wire line) simultaneously. This multi-functionality eliminates the need for separate upper structures and additional vias, reducing manufacturing complexity while achieving both adhesion improvement and electrical connectivity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If T-type UBM technology is used to improve adhesion, then adhesion is improved, but manufacturing cost increases

Engineering Contradiction:
Improveadhesion between UBM and dielectric layerVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent removes the redundant upper horizontal structure and additional via structures from the conventional T-type UBM design. By extracting these unnecessary elements, the patent reduces the number of manufacturing steps and materials required, thereby lowering manufacturing cost while maintaining the essential adhesion improvement function through the simplified UBM wire line configuration.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The UBM wire line is designed to serve dual purposes: improving adhesion between the UBM and dielectric layer while simultaneously functioning as an electrical wire line. This multi-functionality eliminates the need for separate structural and conductive elements, reducing manufacturing complexity and cost while achieving both objectives.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If T-type UBM technology is used, then adhesion is improved, but thickness of front side redistribution layer increases causing warpage

Engineering Contradiction:
Improveadhesion between UBM and dielectric layerVSAvoidwarpage of semiconductor package
Core Design Contradiction:
ReliabilityVSShape

Solution Approach 1:

The patent extracts and removes the upper horizontal structure and additional via structures that contribute to increased thickness of the front side redistribution layer. By taking out these redundant elements, the patent reduces the overall thickness, thereby minimizing thickness differences between front and back sides and preventing warpage in package-on-package structures while maintaining adhesion improvement through the essential UBM wire line.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The UBM wire line performs multiple functions in a single integrated structure: it provides adhesion improvement, serves as an electrical connection path, and maintains a compact thickness profile. This multi-functional design eliminates the need for separate upper structures that would increase thickness and cause warpage, achieving adhesion improvement without compromising package flatness.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS20250022788A1Semiconductor package and manufacturing method thereof
Publication Date: 2025.01.16 SAMSUNG ELECTRONICS CO LTD
  • US20250022788A1 patent drawing
  • US20250022788A1 patent drawing
  • US20250022788A1 patent drawing

AI summary

An embodiment provides a semiconductor package including: a first redistribution layer structure including a plurality of redistribution vias and a plurality of UBM structures; and a first semiconductor die on the first redistribution layer structure, wherein each of the plurality of UBM structures includes a UBM via; and a UBM wire line extending in a horizontal direction on the UBM via and electrically connecting one of the plurality of redistribution vias and the UBM via in the horizontal direction.