Ultrafast Microscopy Beam Timing for Drift-Corrected Imaging

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Solution Overview

Problem

Charged particle microscopy faces challenges in synchronizing pulsed photon and charged particle beams at the picosecond timescale, leading to difficulties in aligning and correcting for target drift, expansion, and heating, which affect image resolution and reliability.

Innovation Solution

A method involving non-overlapping time intervals for directing charged particle and pulsed photon beams, with a detector capturing images during both intervals, and generating a corrected image based on these images to correct for drift and improve signal-to-noise ratio and resolution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If synchronized pulsed photon and charged particle beams are used for ultrafast microscopy, then temporal resolution and imaging capability are improved, but synchronization precision and beam alignment become significantly more difficult

Engineering Contradiction:
Improvetemporal resolutionVSAvoidsynchronization complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The imaging process is segmented into two distinct time intervals: a first time interval where both pulsed photon beam and charged particle beam are directed at the target for pump-probe imaging, and a second time interval where only the charged particle beam is directed at the target for drift correction imaging. This temporal segmentation allows the system to achieve both high temporal resolution imaging and accurate drift correction without requiring complex real-time synchronization mechanisms, as the beams operate in separate time windows.

Inventive Principle:
Principle #1Segmentation

2Reliability

If beam chopping methods are used to address relaxation time properties and saturation effects, then photoemitter performance is improved, but active synchronization between pump and probe sources becomes more challenging

Engineering Contradiction:
Improvephotoemitter performanceVSAvoidsynchronization complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The system employs periodic pulsed operation where the photon beam is activated during specific first time intervals and the charged particle beam operates during alternating second time intervals. This periodic temporal separation allows the photoemitter to undergo relaxation between pulses, preventing saturation effects and residual emission, while eliminating the need for complex active synchronization between independently clocked laser and electron sources.

Inventive Principle:
Principle #19Periodic action

3Measurement precision

If drift correction is performed using additional charged particle beam pulses, then image accuracy is improved, but target damage and expansion increase

Engineering Contradiction:
Improveimage accuracyVSAvoidtarget damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The drift correction function is extracted from the imaging process by dedicating specific second time intervals exclusively to drift measurement using the charged particle beam, separate from the imaging intervals. During these correction intervals, no photon beam is emitted, allowing the system to accumulate drift data without additional photon-induced target damage, while the charged particle beam dosage is minimized to only what is necessary for drift measurement rather than full imaging.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances image resolution and reliability by correcting for target drift and alignment issues, reducing experiment time, and minimizing target damage through efficient use of non-emission periods.

Implementation Method 1

generating a first image of the target based at least in part on first interactions of the first charged particle beam with the target

Methodology Applied
Scientific EffectCharged particle interaction: Electron Beam

Implementation Method 2

directing, during a first time interval, a first charged particle beam and a first pulsed photon beam towards a target

Methodology Applied
Scientific EffectPhoton interaction: Light

Data Source

PatentEP4648088A2Beam alignment and synchronization in microscopy
Publication Date: 2025.11.12 FEI CO
  • EP4648088A2 patent drawingFigure 1
  • EP4648088A2 patent drawingFigure 2
  • EP4648088A2 patent drawingFigure 3

AI summary

A method for flexible beam blanking in ultrafast transmission charged particle microscopy may include directing, during a first time interval, a first charged particle beam and a first pulsed photon beam towards a target, generating a first image of the target based at least in part on first interactions of the first charged particle beam with the target, directing, during a second time interval, a second charged particle beam toward the target, and generating a second image of the target based at least in part on second interactions of the second charged particle beam, and generating a corrected image of the target based at least in part on the first and second image.