Ultrafast Laser Writing of Periodic Structures Without Bifurcation

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Solution Overview

Problem

Current methods for generating highly regular periodic nanostructures on metallic surfaces via laser ablation face challenges such as loss of regularity, double periodicity, and bifurcation points, limiting their application in fields like microelectronics and photovoltaics due to insufficient structural uniformity and high-speed writing capabilities.

Innovation Solution

The method involves selecting specific conditions for laser pulse duration, illuminated area size, laser fluence, and dielectric permittivity to induce strong ablation while maintaining coherence of surface electromagnetic waves, ensuring highly regular periodic structures with minimal bifurcation points and high scanning speed by adjusting overlap and repetition rates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional laser ablation methods are used to generate periodic structures, then processing speed can be increased, but structural regularity and uniformity deteriorate due to loss of coherence and appearance of bifurcation points

Engineering Contradiction:
Improveprocessing speedVSAvoidstructural regularity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies parameter changes by carefully controlling laser pulse duration (ultrafast regime), fluence (above ablation threshold), and repetition rate to maintain surface electromagnetic wave coherence during ablation. These parameter optimizations enable high-speed processing while preserving structural regularity with FFT dispersion angles below 15 degrees, eliminating the trade-off between speed and precision.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If laser fluence is increased to improve ablation efficiency, then processing speed increases, but excessive molten substrate formation occurs leading to loss of periodic structure regularity

Engineering Contradiction:
Improveablation efficiencyVSAvoidperiodic structure regularity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent optimizes laser fluence to be above the ablation threshold but carefully controlled to induce strong ablation without excessive molten substrate formation. This precise fluence control maintains the periodic absorption profile on the metallic surface, achieving high ablation efficiency while preserving structural regularity.

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If overlapping scanning is used to cover large areas, then coverage area increases, but regularity is lost due to accumulation of deviations across multiple scan lines

Engineering Contradiction:
Improvecoverage areaVSAvoidregularity across lines
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent employs preliminary action by using a small illuminated area (diameter ≤ 30 μm) that maintains surface electromagnetic wave coherence across the entire illuminated region. This coherent interaction ensures that periodic structures are formed with high regularity from the beginning, and this regularity is consistently reproduced across multiple overlapping scan lines, achieving uniform coverage over large areas with FFT dispersion angles below 15 degrees.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables ultrafast writing of highly regular periodic structures with reduced angle dispersion and no bifurcation points, achieving high regularity and uniformity on large areas, suitable for industrial applications in photovoltaics and microelectronics.

Implementation Method 1

The fluence is selected so that strong the ablation of the substrate is induced with avoiding formation of excessive volume of molten substrate

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

strong the ablation of the substrate is induced

Methodology Applied
Scientific EffectAblation: Ablation

Implementation Method 3

providing a high degree of coherence of the surface electromagnetic waves

Methodology Applied
Scientific EffectSurface electromagnetic wave coherence:

Implementation Method 4

preserving the said periodic absorption profile on the metallic surface

Methodology Applied
Scientific EffectPeriodic absorption: Absorption (EM radiation)

Data Source

PatentEP3481583B1Method and system of ultrafast laser writing of highly-regular periodic structures
Publication Date: 2021.01.27 FYZIKALNI USTAV AV CR V V I
  • EP3481583B1 patent drawingFigure 1~2
  • EP3481583B1 patent drawingFigure 3~4
  • EP3481583B1 patent drawingFigure 5~6

AI summary

A method, a product by the method and device of preparation of highly-regular periodic structure using a pulsed laser beam irradiating a spot on a surface of a substrate are disclosed. The method of direct formation of highly-regular periodic structure on a materials uses activation of Surface Electromagnetic Wave (SEW) interfering with the laser beam on the surface of the substrate in a manner which ensures high quality and regularity of the obtained pattern.