Ultrafiltration Membrane Module Flow Rate Control
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Solution Overview
Problem
The increasing integration and miniaturization of semiconductor devices require efficient removal of impurities from ultrapure water, as existing methods fail to rapidly stabilize ultrafiltration membrane modules after membrane replacement, affecting product quality and process reliability.
Innovation Solution
A method involving the installation of an ultrafiltration membrane in a module, followed by flushing with deionized water, increasing and decreasing the flow rate to remove particles and gases, and measuring particle concentration using a particle counter to ensure the water meets reference standards.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the ultrafiltration membrane module is flushed with deionized water at a constant flow rate after membrane replacement, then the structure is simple and easy to operate, but the membrane module cannot be rapidly stabilized and impurities are not effectively removed
Solution Approach 1:
The patent applies the dynamics principle by transitioning from a constant flow rate to a variable flow rate system. The flushing process uses multiple stages with different flow rates: an initial high flow rate to rapidly remove particles and gases, followed by progressively lower flow rates to stabilize the membrane. This dynamic adjustment of flow rate parameters enables rapid stabilization while maintaining operational simplicity through automated control.
Solution Approach 2:
The patent implements periodic action through multi-stage flushing cycles. Each stage consists of alternating flow rate increases and decreases, creating periodic flow patterns that enhance particle removal efficiency. The cyclic variation in flow rate prevents particle re-deposition and ensures thorough cleaning of the membrane surface, achieving rapid stabilization without complex manual intervention.
2Object-generated harmful factors
If the flow rate is continuously increased to rapidly remove impurities, then the particle removal efficiency is improved, but the membrane may be damaged and system reliability deteriorates
Solution Approach 1:
The dynamics principle is applied by implementing a controlled, staged flow rate adjustment rather than continuous increase. The system dynamically adapts the flow rate to match the membrane's承受能力 at different cleaning stages. High flow rates are applied only during initial particle removal when the membrane is most robust, then gradually reduced to protect the membrane during later stabilization phases, thus removing impurities effectively while maintaining membrane integrity.
Solution Approach 2:
The preliminary action principle is applied by performing a pre-flushing stage at high flow rate before the main flushing process. This preliminary high-flow stage removes the bulk of loose particles and gases that pose the least risk to membrane integrity. Subsequent stages then operate at lower, safer flow rates for finer particle removal, preventing membrane damage while achieving thorough cleaning through this staged approach.
3Productivity
If multiple flushing stages are implemented to rapidly stabilize the membrane, then the particle removal efficiency is improved, but the process complexity increases
Solution Approach 1:
The self-service principle is applied by implementing automated flow rate control that manages the multi-stage flushing process without requiring complex manual intervention. The system automatically sequences the different flow rate stages, monitors particle concentration, and adjusts parameters based on pre-programmed protocols. This automation handles the process complexity internally while presenting a simple operational interface to the user, achieving rapid stabilization without increasing operational complexity.
Solution Approach 2:
The feedback principle is applied by incorporating particle concentration monitoring that provides real-time information about flushing effectiveness. The system uses this feedback to automatically adjust flow rate parameters and determine when stabilization is complete. This closed-loop control manages the complexity of multiple flushing stages by using objective measurements to guide the process, reducing the need for complex manual decision-making while maintaining high productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach quickly stabilizes the ultrafiltration membrane module and efficiently manages the ultrapure water manufacturing system by effectively removing impurities, ensuring the quality of ultrapure water meets stringent semiconductor manufacturing standards.
Implementation Method 1
supplying deionized water to the ultrafiltration membrane module; and flushing the ultrafiltration membrane module with the deionized water
Implementation Method 2
measuring a particle concentration of treated water flowing out from the first ultrafiltration membrane module using a particle counter
Data Source
AI summary
A method of cleaning an ultrafiltration membrane module includes installing an ultrafiltration membrane in an ultrafiltration membrane module, supplying deionized water to the ultrafiltration membrane module, and flushing the ultrafiltration membrane module with the deionized water by increasing decreasing a flow rate of the deionized water supplied to the ultrafiltration membrane module.