Ultraprecision Height Adjustment Structure With Vibration Damping

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Solution Overview

Problem

Existing position adjustment devices for ultraprecision machine tools face rigidity and vibration damping issues, leading to difficulties in precisely positioning objects and maintaining machining accuracy during machining processes.

Innovation Solution

A position adjustment device comprising a fixed portion, a movable portion, expanding and contracting portions, and a metal member with a damping alloy, coupled with a deflector-type ball screw mechanism for height adjustment, providing high rigidity and superior vibration damping properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a position adjustment device is constructed by coupling a plurality of parts, then the device can adjust the position of the object to be supported, but the load concentrates on the connections between parts causing distortion and reducing positioning precision

Engineering Contradiction:
Improveposition adjustment capabilityVSAvoidpositioning precision
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The patent merges multiple parts into an integrated structure where the movable portion, fixed portion, and expanding/contracting portions are coupled to form a unified rigid framework. This integration eliminates connection points that would concentrate load and cause distortion, thereby maintaining positioning precision while enabling height adjustment through the expanding and contracting portions.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent employs a damping alloy as a metal member within the position adjustment device. This composite material approach combines structural rigidity with vibration damping properties, reducing distortion under load and maintaining positioning precision even when the device is subjected to machining forces.

Inventive Principle:
Principle #40Composite materials

2Productivity

If the object to be supported is a tool used in machining, then the tool can perform machining operations, but vibration during machining deteriorates machining accuracy

Engineering Contradiction:
Improvemachining capabilityVSAvoidmachining accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The damping alloy integrated into the position adjustment device serves as a vibration damping component that absorbs machining-induced vibrations. This material choice directly addresses the vibration problem while maintaining the structural integrity needed for productive machining operations.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent converts the harmful vibration energy generated during machining into beneficial damping effects through the damping alloy. The vibration energy is absorbed and dissipated by the damping material, transforming what would be a source of inaccuracy into a controlled energy dissipation mechanism that stabilizes the machining process.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device ensures high rigidity and effective vibration damping, enabling precise positioning and maintaining high machining accuracy, especially in ultraprecision machine tools performing operations at 100 nm or less.

Implementation Method 1

a metal member (16) fixed to the fixed portion (22, 56) and the movable portion (24, 58)... having high rigidity and a superior vibration damping property

Methodology Applied
Scientific EffectVibration damping: Damping

Data Source

PatentUS11577351B2Position adjustment device and ultraprecision machine tool
Publication Date: 2023.02.14 FANUC LTD
  • US11577351B2 patent drawing
  • US11577351B2 patent drawing
  • US11577351B2 patent drawing

AI summary

A position adjustment device for adjusting the height of an object to be supported includes: a fixed portion; a movable portion provided to be movable in the height direction relative to the fixed portion and supporting the object to be supported; an expanding and contracting portion coupled to the fixed portion and the movable portion and configured to expand and contract in the height direction; an adjustment mechanism configured to adjust the position of the movable portion in the height direction relative to the fixed portion; and a metal member fixed to the fixed portion and the movable portion.