Ultrapure Water Compound Detection via Decomposition Difference Measurement
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Solution Overview
Problem
Existing methods for determining the concentration of compounds in ultrapure water are time-consuming and lack accuracy, especially as integration density in semiconductor devices increases, necessitating stricter quality standards.
Innovation Solution
A method and apparatus that divide ultrapure water into two parts, where one part undergoes a decomposition reaction to produce a characteristic substance, allowing for high-accuracy, real-time measurement of compound concentration by comparing the concentrations of this substance in both parts without major system changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional measurement methods are used to determine compound concentration in ultrapure water, then measurement can be performed, but the process is time-consuming and lacks accuracy
Solution Approach 1:
The ultrapure water sample is divided into two separate streams: one that undergoes decomposition reaction and one that serves as reference. This segmentation allows simultaneous measurement of total substance (decomposed) and original substance (reference), enabling rapid determination of compound concentration without sequential processing delays
Solution Approach 2:
The decomposition reaction is initiated in advance for one portion of the sample before measurement begins. By pre-converting the target compound into a measurable form (e.g., converting organic compounds to CO2 through oxidation), the system eliminates the need for time-consuming on-site analysis and enables immediate concentration determination
2Manufacturing precision
If stricter quality standards are implemented for ultrapure water, then semiconductor device quality improves, but measurement and control become more difficult
Solution Approach 1:
The measurement approach transforms the detection parameter from measuring the compound directly (which is difficult at ultra-low concentrations) to measuring the decomposition products (such as CO2, H2O, or other characteristic substances). This parameter transformation enables detection of trace compounds that would otherwise be below the detection threshold of conventional instruments
Solution Approach 2:
A decomposition reaction system acts as an intermediary between the target compound and the measurement instrument. By converting the compound into a more detectable form through chemical transformation (e.g., oxidation, hydrolysis, or combustion), the system bridges the gap between trace compound presence and measurable signal, enabling detection at stricter quality standards
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid, precise determination of compound concentrations in ultrapure water, ensuring quality standards are met, reducing waste and costs by reusing treated water, and improving semiconductor device and component yields.
Implementation Method 1
the compound in the first part undergoes a decomposition reaction to include a characteristic substance
Data Source
AI summary
A method for determining the concentration of a compound in ultrapure water is provided. The method includes dividing the ultrapure water into a first part and a second part and decomposing the compound in the first part, so that the first part includes a characteristic substance. The method also includes measuring a first concentration of the characteristic substance in the first part and a second concentration of the characteristic substance in the second part and calculating the difference between the first concentration and the second concentration. The method further includes obtaining the concentration of the compound in the ultrapure water based on the difference.