Ultrapure Water Supply With Parallel Pump Backup Control
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Solution Overview
Problem
Existing ultrapure water supply systems in semiconductor fabrication face instability due to pump and power supply malfunctions, which can disrupt the precise flow rate control necessary for substrate processing.
Innovation Solution
An ultrapure water supplying apparatus with parallel pumps and power supplies, along with a pressure sensor and control unit, ensures stable ultrapure water delivery by switching to backup systems when malfunctions occur.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single pump is used to supply ultrapure water, then the device complexity is reduced, but the reliability deteriorates due to pump malfunctions disrupting flow rate control
Solution Approach 1:
A backup pump is prepared in advance and connected in parallel to the main pump. When the main pump malfunctions, the backup pump can immediately take over to maintain ultrapure water supply, thus resolving the reliability issue without significantly increasing operational complexity
Solution Approach 2:
The control unit selectively activates specific pumps based on local conditions (pressure sensor readings). The system maintains simplicity by only engaging the backup pump when necessary, rather than running all pumps continuously, thus balancing reliability with device complexity
2Reliability
If multiple pumps are used in parallel to ensure stable flow rate, then the reliability is improved, but the device complexity increases
Solution Approach 1:
The backup pump is pre-configured in parallel with the main pump, ready to activate when needed. This preliminary arrangement ensures reliability without requiring complex real-time decision-making or continuous operation of multiple pumps
Solution Approach 2:
The system uses automatic pressure sensing and control unit logic to self-regulate pump operation. When pressure drops below a threshold, the backup pump activates automatically; when pressure normalizes, it deactivates. This self-service mechanism minimizes manual intervention and control complexity
3Manufacturing precision
If a pressure sensor and control unit are added to monitor and adjust pump operation, then the manufacturing precision of flow rate control is improved, but the device complexity increases
Solution Approach 1:
A pressure sensor continuously monitors the ultrapure water supply pressure and provides feedback to the control unit. The control unit adjusts pump operation based on this feedback to maintain flow rate within the specified range (50-200 mL/min), achieving precise control through a simple feedback loop
Solution Approach 2:
The control unit automatically regulates pump operation based on pressure sensor input without requiring external intervention. The system self-corrects flow rate deviations by activating or deactivating the backup pump, maintaining precision while minimizing operational complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Maintains ultrapure water flow rates within a specific range, enhancing substrate processing yield and reliability by compensating for pump and power failures.
Implementation Method 1
a reverse osmotic membrane device connected to the ion exchange resin device
Implementation Method 2
a hollow fiber membrane device connected to the reverse osmotic membrane device
Data Source
AI summary
An ultrapure water supplying apparatus may include an activated carbon filtering device, an ion exchange resin device connected to the activated carbon filtering device, a reverse osmotic membrane device connected to the ion exchange resin device, a hollow fiber membrane device connected to the reverse osmotic membrane device, a first fluid driving part between the reverse osmotic membrane device and the hollow fiber membrane device, and a control unit configured to control the first fluid driving part. The first fluid driving part may include first, second, and third pumps, which are connected in parallel to the reverse osmotic membrane device, and a pressure sensor located between the first pump and the hollow fiber membrane device. The control unit may be configured to control each of the first, second, and third pumps, based on a signal transmitted from the pressure sensor.