Ultrasonic Atomizer Layout for Stable Thin-Film Mist Formation

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Solution Overview

Problem

Existing methods for atomizing raw materials in film formation fail to achieve high-quality films with suppressed particle adhesion and high productivity, especially when film-formation speed is increased.

Innovation Solution

An atomizing apparatus comprising a raw-material container, a cylindrical member, and an ultrasound generator with specific positioning to emit ultrasound outside the liquid tank, ensuring the ultrasound center line does not intersect the cylindrical member, stabilizing the formation of high-quality and high-density mist.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If mist is supplied in larger amount to increase film-formation speed, then productivity is improved, but particle adhesion worsens

Engineering Contradiction:
Improvefilm-formation speedVSAvoidfilm quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent changes the physical parameters of ultrasound by positioning the generation source outside the liquid tank and adjusting the center line orientation relative to the cylindrical member. This optimization of ultrasound parameters enables efficient atomization at higher mist supply rates without increasing particle adhesion, thus resolving the contradiction between productivity and film quality

Inventive Principle:
Principle #35Parameter changes

2Productivity

If ultrasound generation source is positioned inside the liquid tank, then atomization efficiency is improved, but mist density stability worsens

Engineering Contradiction:
Improveatomization efficiencyVSAvoidmist density stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The patent extracts the ultrasound generation source from inside the liquid tank and positions it outside, with ultrasound propagating through a middle solution. This extraction prevents direct contact between the ultrasound source and raw-material solution, stabilizing mist density while maintaining atomization efficiency through optimized ultrasound transmission

Inventive Principle:
Principle #2Taking out (Extraction)

3Device complexity

If ultrasound center line intersects the cylindrical member, then structural simplicity is improved, but mist quality worsens

Engineering Contradiction:
Improvestructural simplicityVSAvoidmist quality
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent introduces asymmetric positioning where the ultrasound generation source's center line does not intersect the cylindrical member's side wall. This asymmetric arrangement, combined with maintaining a specific distance, optimizes ultrasound propagation patterns to produce high-quality mist while preserving reasonable structural simplicity

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient formation of high-quality films with reduced particle adhesion and increased productivity by stabilizing mist density and preventing large particle interference.

Implementation Method 1

an ultrasound generator having at least one ultrasound generation source configured to emit ultrasound

Methodology Applied
Scientific EffectUltrasound: Ultrasound

Implementation Method 2

an ultrasound generation source configured to emit ultrasound

Methodology Applied
Scientific EffectUltrasonic vibration: Ultrasonic Vibration

Implementation Method 3

wherein the ultrasound propagates to the raw-material solution through a middle solution

Methodology Applied
Scientific EffectAcoustic cavitation: Acoustic Cavitation

Data Source

PatentUS12576420B2Atomizing apparatus for film formation and film forming apparatus using the same
Publication Date: 2026.03.17 SHIN ETSU CHEMICAL CO LTD
  • US12576420B2 patent drawing
  • US12576420B2 patent drawing
  • US12576420B2 patent drawing

AI summary

An atomizing apparatus for film formation enabling high-quality thin film formation with suppressed particle adhesion, including: a raw-material container accommodating a raw-material solution; a cylindrical member connecting inside the raw-material container to an outer unit, and disposed so a lower end of the cylindrical member does not touch a liquid surface of the raw-material solution in the container; an ultrasound generator having at least one source emitting ultrasound; and a liquid tank where the ultrasound propagates the raw-material solution through a middle solution. The generation source is outside the liquid tank and has a center between a plane extending from an inner side wall of the raw-material container and a plane extending from an outer side wall of the cylindrical member. A center line of an ultrasound-emitting surface of the ultrasound generation source is designated as u, wherein the center line u does not intersect the cylindrical member side wall.