Ultrasonic Bonded Chamber Components for Plasma-Resistant Durability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Manufacturing chamber components face challenges in withstanding harsh environments due to high temperatures, corrosive gases, and high energy plasma, leading to material degradation and performance compromises.
Innovation Solution
Ultrasonic bonding of metal matrix composite materials with metal alloys to form robust chamber components, enabling additive manufacturing and embedding sensors, while providing resistance to plasma and high temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If traditional materials are used in chamber components, then manufacturing simplicity is maintained, but resistance to plasma and high temperatures deteriorates
Solution Approach 1:
The patent applies composite materials by bonding metal matrix composite materials to metal alloys through ultrasonic bonding. This creates a multi-layer structure where the metal matrix composite provides enhanced resistance to plasma and high temperatures, while the metal alloy base provides structural integrity and ease of manufacturing. The composite structure resolves the contradiction by combining materials with complementary properties.
Solution Approach 2:
The patent segments the chamber component into multiple layers with different material properties. The base metal alloy layer handles structural requirements and manufacturing considerations, while the bonded metal matrix composite layer provides specialized resistance to plasma and high temperatures. This segmentation allows each layer to be optimized for its specific function.
2Reliability
If material strength is increased to withstand harsh environments, then durability improves, but adaptability to different process conditions deteriorates
Solution Approach 1:
The composite structure allows the component to maintain durability through the strengthened metal matrix composite layer while preserving adaptability by keeping the metal alloy base layer that can be designed for specific mechanical properties. The combination enables the component to meet both durability requirements and adaptability to different process conditions.
3Reliability
If complex geometries are manufactured to improve performance, then functional effectiveness increases, but manufacturing complexity increases
Solution Approach 1:
The patent segments the manufacturing process into two stages: first manufacturing the complex geometry in the metal alloy base layer using conventional techniques, then bonding the metal matrix composite layer on top. This segmentation allows the complex geometry to be created with materials that are easier to form, while the composite layer provides the necessary environmental resistance without requiring complex manufacturing processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the strength and durability of chamber components, allowing for complex geometries and improved resistance to plasma and high temperatures, with reduced deformation and enhanced performance.
Implementation Method 1
providing ultrasonic vibrations to bond the first foil to the body... providing ultrasonic vibrations to bond the second foil to the first foil
Data Source
AI summary
An article includes a body and an ultrasonic bonded layer deposited on the body. The ultrasonic bonded layer includes a first layer of a first material. The first material includes a metal or metal alloy, The ultrasonic bonded layer further includes a second layer of a second material bonded to the first layer. The second material includes a metal matrix composite material.