Ultrasonic Bonding Feedback Control via Vibration State Detection

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Solution Overview

Problem

Existing ultrasonic bonding technologies struggle to accurately determine the fracture mode of all bonding members post-bonding, making it difficult to control the bonding process effectively.

Innovation Solution

An ultrasonic bonding apparatus and method that includes a sensor to detect the vibration state of bonding members during the bonding process, allowing for real-time determination of the bonding state and fracture mode, and adjusts the bonding parameters accordingly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If ultrasonic bonding is performed using conventional methods with external sensors, then bonding strength can be estimated, but fracture modes of all bonding members cannot be determined

Engineering Contradiction:
Improvebonding state determination accuracyVSAvoidfracture mode information
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

The patent replaces mechanical post-bonding tensile testing with acoustic emission detection during the bonding process itself. Acoustic sensors detect sound waves generated by fracture events in real-time, allowing determination of fracture modes without mechanical destruction after bonding. This substitution enables continuous monitoring and information capture during the bonding process rather than requiring separate testing steps.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system implements real-time feedback by continuously monitoring acoustic emission signals during ultrasonic bonding. The bonding state and fracture modes are determined based on acoustic emission waveforms, allowing immediate identification of bonding quality and fracture characteristics. This feedback mechanism enables in-process quality control rather than post-process inspection.

Inventive Principle:
Principle #23Feedback

2Loss of information

If post-bonding tensile testing is performed to determine fracture modes, then fracture information can be obtained, but all bonding members cannot be inspected

Engineering Contradiction:
Improvefracture mode informationVSAvoidbonding inspection efficiency
Core Design Contradiction:
Loss of informationVSProductivity

Solution Approach 1:

The patent enables continuous acoustic emission monitoring throughout the entire bonding process, allowing all bonding members to be inspected simultaneously as they are bonded. The acoustic sensors continuously detect fracture events in real-time without interruption, providing uninterrupted information on the bonding state of all members. This eliminates the need for discrete post-bonding testing of individual samples.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The system replaces time-consuming mechanical tensile testing with rapid acoustic emission detection. Acoustic sensors instantly detect fracture events as they occur during bonding, providing immediate information on fracture modes for all bonding members. This substitution dramatically reduces inspection time from post-bonding mechanical testing to real-time acoustic monitoring during the bonding process.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If conventional ultrasonic bonding control is used, then bonding can be performed, but precise control based on real-time bonding state is difficult

Engineering Contradiction:
Improvebonding process controlVSAvoidbonding quality consistency
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The system implements real-time feedback control by continuously monitoring acoustic emission signals during bonding. The bonding state is determined based on acoustic emission waveforms, providing immediate information on bonding progress and quality. This feedback enables dynamic adjustment of bonding parameters to maintain optimal bonding conditions and ensure consistent quality across all bonding members.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent enables preliminary determination of bonding state and fracture mode before the bonding process is complete. By continuously monitoring acoustic emissions during bonding, the system can identify bonding quality issues and fracture risks in advance, allowing corrective actions to be taken before defective bonds are finalized. This preliminary detection capability improves bonding reliability by preventing defective bonds.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise control of the bonding process by identifying defective bonds and optimizing bonding conditions, thereby improving yield and enabling more accurate quality control.

Implementation Method 1

a sensor to detect the vibration state of bonding members during the bonding process

Methodology Applied
Scientific EffectAcoustic emission: Acoustic Emission

Implementation Method 2

uses a bonding tool to apply pressure and an ultrasonic wave to bonding members placed on a stage, and bond the bonding members together

Methodology Applied
Scientific EffectUltrasonic vibration: Ultrasonic Vibration

Data Source

PatentUS12583186B2Ultrasonic bonding method, ultrasonic bonding apparatus, and ultrasonic bonding system
Publication Date: 2026.03.24 KK TOSHIBA
  • US12583186B2 patent drawing
  • US12583186B2 patent drawing
  • US12583186B2 patent drawing

AI summary

According to one embodiment, an ultrasonic bonding method for bonding a plurality of bonding members together by applying pressure and an ultrasonic wave includes a pressing step of applying pressure to one bonding member and another bonding member so as to press against each other, an application step of applying an ultrasonic wave to the one bonding member, a detection step of detecting a vibration state of another bonding member during the application step, and a step of determining a state of bonding between the bonding members based on the vibration state acquired in the detection step.