Ultrasonic Bore-Box Locating System for Semiconductor Fabrication
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Solution Overview
Problem
Existing locating arrangements face challenges in accurately determining the position of identification units in manufacturing environments, particularly in semiconductor fabrication facilities, due to stringent requirements for signal propagation times and the need for efficient communication and localization methods.
Innovation Solution
A locating arrangement utilizing ultrasonic transmitters and radiation receivers is implemented, where ultrasonic transmitters are spaced at uniform distances along paths, allowing for precise position determination through propagation time measurements and coarse localization via radiation field strength, enabling efficient communication and accurate localization with reduced circuitry and installation outlay.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electromagnetic waves (radio waves or light) are used for locating, then locating is technically possible, but the circuitry becomes excessively complex due to stringent requirements for signal propagation time processing
Solution Approach 1:
The patent replaces electromagnetic wave-based locating systems with ultrasonic wave-based locating systems. This substitution fundamentally changes the physical medium from electromagnetic waves to acoustic waves, enabling simpler circuitry while maintaining locating capability. The ultrasonic transmitters and receivers operate at frequencies that allow for manageable signal processing requirements compared to electromagnetic waves.
2Measurement precision
If ultrasonic transmitters are installed along a path to enable locating, then locating capability is achieved, but the installation outlay increases due to the number of transmitters required
Solution Approach 1:
The patent segments the locating system into discrete transmitter units positioned at specific intervals along paths. Each transmitter operates independently and transmits ultrasonic signals that can be received and processed to determine the position of identification units. This segmentation allows for modular installation and flexible configuration based on the specific locating requirements of different areas.
Solution Approach 2:
The ultrasonic transmitters operate in a periodic manner, transmitting ultrasonic pulses at specific intervals rather than continuously. This periodic operation reduces the overall system complexity and installation requirements compared to continuous transmission systems, while still enabling accurate position determination through measurement of pulse propagation times.
3Measurement precision
If transmitters are spaced closer together to improve spatial resolution, then locating accuracy improves, but the number of transmitters and propagation time requirements increase
Solution Approach 1:
The patent optimizes the spacing parameter between transmitters to achieve a balance between spatial resolution and propagation time requirements. By carefully selecting appropriate distances between ultrasonic transmitters, the system achieves sufficient locating accuracy without requiring excessive transmitter density or having overly stringent propagation time processing requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides accurate localization with an accuracy of a few centimeters, supports dynamic communication, and optimizes the transport process in flexible production environments, enabling paperless fabrication by integrating path stipulation and information output for efficient batch box transport.
Implementation Method 1
Ultrasound having a propagation speed in air at room temperature of approximately 340 m/s is more suitable. Propagation times of the signals in the near range are thus e.g. less than 50 milliseconds.
Implementation Method 2
The actual measurement only ever requires the two nearest or only very few transmitters in the vicinity of the object to be located.
Data Source
AI summary
A locating arrangement has ultrasonic transmitters strung along a straight section. The use of the ultrasonic transmitters for determining a location along the section is possible with a high spatial resolution and for a multiplicity of identification units.