Ultrasonic Cleaning via Intermediate Medium Refraction

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Solution Overview

Problem

Conventional ultrasonic cleaning methods fail to uniformly expose the entire surface of a substrate to ultrasonic waves due to interference from holding structures, leading to areas that are not directly exposed to the cleaning process.

Innovation Solution

The method involves using a cleaning apparatus with a cleaning tank and a coupling tank, where an intermediate medium is used to refract ultrasonic waves by varying the sonic velocity difference between the cleaning liquid and the intermediate medium, allowing the waves to travel in a modified direction and reducing shadowed areas on the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a holding member is used to hold the substrate in the cleaning tank, then the substrate can be securely positioned, but the holding member blocks ultrasonic waves and creates shadowed areas on the substrate surface

Engineering Contradiction:

Improvesubstrate positioning stabilityVSAvoidcleaning uniformity

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The patent introduces a coupling tank filled with an intermediate medium as a mediator between the ultrasonic wave source and the cleaning liquid. This intermediary structure allows ultrasonic waves to be transmitted through the intermediate medium into the cleaning liquid, enabling uniform ultrasonic exposure of the substrate surface without being blocked by the holding member.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If an ultrasonic refraction member is swung to vary ultrasonic wave direction, then shadowed areas are minimized, but the apparatus becomes complex and expensive

Engineering Contradiction:

Improvecleaning uniformityVSAvoidapparatus structure

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical swinging system with a stationary coupling tank filled with an intermediate medium. Instead of mechanically moving parts to change ultrasonic wave direction, the system uses the acoustic impedance difference between the intermediate medium and cleaning liquid to refract and redirect ultrasonic waves, achieving the same effect without complex mechanical structures.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If a cylindrical rod is disposed on the bottom surface to disperse ultrasonic waves, then substrate surface exposure is improved, but the apparatus cannot adjust ultrasonic exposure according to cleaning conditions

Engineering Contradiction:

Improvesubstrate surface exposureVSAvoidcleaning condition adaptability

Core Design Contradiction:

Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent creates a dynamic system where the coupling tank can be positioned at different locations and orientations relative to the cleaning tank. This allows the ultrasonic wave transmission path to be adjusted according to different cleaning conditions, substrate types, and contamination levels, providing adaptability that fixed structures cannot achieve.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures that the substrate is cleaned without large areas being shadowed by holding members, achieving more efficient and cost-effective cleaning by minimizing the need for complex mechanical structures and allowing for adjustable ultrasonic exposure.

Implementation Method 1

an intermediate medium is used to refract ultrasonic waves by varying the sonic velocity difference between the cleaning liquid and the intermediate medium, allowing the waves to travel in a modified direction

Methodology Applied

Scientific EffectRefraction: Refraction

Implementation Method 2

ultrasonically vibrating the first cleaning liquid via a first intermediate medium in contact with the first cleaning tank

Methodology Applied

Scientific EffectUltrasonic vibration: Ultrasonic Vibration

Data Source

PatentUS10137483B2Ultrasonic cleaning method

Publication Date: 2018.11.27 SILTRONIC AG

AI summary

A cleaning method for cleaning an object involves disposing the object in a cleaning liquid held in a cleaning tank; and ultrasonically vibrating the cleaning liquid via an intermediate medium in contact with the cleaning tank, wherein the ultrasonically vibrating includes: ultrasonically vibrating the cleaning liquid with a first difference between respective sonic velocities allowable in the cleaning liquid and the intermediate medium; and ultrasonically vibrating the cleaning liquid with a second difference between the respective sonic velocities allowable in the cleaning liquid and the intermediate medium, wherein the second difference is different from the first difference.