Ultrasonic Element Slit Venting for Vibrating Plate Protection

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Solution Overview

Problem

Existing ultrasonic elements face issues such as damage to the vibrating plate due to air pressure changes during manufacturing and inefficient vibration due to sealed spaces, leading to energy consumption for pressure adjustment.

Innovation Solution

The ultrasonic element design includes a substrate with a vibrating plate, a piezoelectric element, a protective substrate, and a suppressing unit with a slit to allow atmospheric pressure equalization, preventing damage and enhancing vibration efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the sealed space is enclosed by the vibrating plate, sealing plate, and suppressing unit, then the structure is sealed, but air pressure changes due to vibrating plate deformation causing energy consumption and damage

Engineering Contradiction:

Improveprevention of vibrating plate damageVSAvoidenergy consumption for vibration

Core Design Contradiction:

ReliabilityVSUse of energy by moving object

Solution Approach 1:

The suppressing unit is divided into multiple suppression portions arranged in a matrix pattern, creating segmented pressure equalization regions. Each suppression portion includes through-holes that allow air pressure equalization between adjacent regions, preventing damage while maintaining vibration efficiency

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The suppressing unit incorporates through-holes throughout its structure, creating a porous configuration that allows air pressure equalization. This enables the sealed space to maintain pressure balance during vibrating plate deformation, preventing damage and reducing energy consumption

Inventive Principle:

Principle #31Porous materials

2Ease of manufacture

If vacuum equipment is used to form the opening in the silicon substrate, then the opening is formed, but air pressure inside the sealed space presses against the vibrating plate causing damage

Engineering Contradiction:

Improveformation of openingVSAvoidintegrity of vibrating plate

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The suppressing unit is segmented into multiple suppression portions with through-holes, creating distributed pressure equalization pathways. This allows gradual pressure adjustment during manufacturing vacuum processes, preventing sudden pressure differential damage to the vibrating plate

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The through-holes in the suppressing unit provide pre-established pressure equalization pathways that cushion against pressure changes during manufacturing. This beforehand cushioning prevents damage during vacuum formation of the opening

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively prevents damage to the vibrating plate and enhances vibration efficiency by maintaining atmospheric pressure within the internal space, ensuring high-intensity ultrasonic wave transmission.

Implementation Method 1

a piezoelectric element provided at a second surface on an opposite side from the first surface of the vibrating plate

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a slit is formed in the suppressing unit, in plan view from a stacking direction... maintaining atmospheric pressure within the internal space

Methodology Applied

Scientific EffectPressure equalization: Pressure Gradient

Data Source

PatentUS12350711B2Ultrasonic element and ultrasonic device

Publication Date: 2025.07.08 SEIKO EPSON CORP

AI summary

An ultrasonic element includes a substrate in which an opening is formed, a vibrating plate provided at the substrate, the vibrating plate including a first surface in contact with the substrate, the vibrating plate blocking the opening, a piezoelectric element provided at a second surface on an opposite side from the first surface of the vibrating plate, a protective substrate facing the second surface and protecting the piezoelectric element, and a suppressing unit provided between the protective substrate and the vibrating plate, the suppressing unit being configured to suppress a vibration of the vibrating plate, in which in the piezoelectric element, a first electrode, a piezoelectric layer, and a second electrode are stacked in this order from the second surface, and an active part is a part of the vibrating plate where the first electrode, the piezoelectric layer, and the second electrode overlap, the suppressing unit is provided around the active part, and a slit is formed in the suppressing unit, in plan view from a stacking direction.