Arc-Shaped Ultrasonic Cleaning Head for Substrate Edge Coverage
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Solution Overview
Problem
Existing ultrasonic cleaning units face issues with reduced cleaning power and extended cleaning time due to structural interference between guide pins and the cleaning head, especially at the edge portions of larger substrates, leading to inefficient scanning and prolonged cleaning processes.
Innovation Solution
The ultrasonic cleaning unit features a cleaning head with an arc-shaped edge corresponding to the substrate's outer circle, incorporating straight, arc, and curved sections, and a recessed step unit to avoid interference with guide pins, ensuring efficient energy transfer and reduced scanning movements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the cleaning head is designed with a conventional shape, then the manufacturing is simple, but the cleaning power at edge portions is reduced due to structural interference with guide pins
Solution Approach 1:
The cleaning head incorporates an arc-shaped edge portion with a curved surface that corresponds to the curvature radius of the substrate. This curved design allows the cleaning head to follow the circular path of the substrate during rotation, maintaining consistent contact and ultrasonic energy transfer at the edge portions without interfering with the guide pins, thereby resolving the contradiction between cleaning effectiveness and structural simplicity.
2Reliability
If the cleaning head covers the entire substrate area, then the cleaning coverage is complete, but the scanning movements increase and cleaning time is extended
Solution Approach 1:
The cleaning head is designed with different functional zones: a main cleaning area for the central substrate region and a specifically shaped arc-shaped edge portion for the perimeter. This local differentiation allows the cleaning head to efficiently cover the entire substrate area including edges without requiring excessive scanning movements, as the arc-shaped edge is specifically configured to match the substrate geometry, reducing unnecessary travel time while maintaining complete coverage.
3Reliability
If the cleaning head approaches the edge portions of the substrate, then the edge cleaning effectiveness improves, but structural interference with guide pins occurs
Solution Approach 1:
The arc-shaped edge portion of the cleaning head is designed with a curved surface that matches the curvature radius of the substrate. This geometric correspondence allows the cleaning head to approach and maintain effective contact with the edge portions of the substrate during rotation without colliding with the guide pins, thereby achieving both edge cleaning effectiveness and avoidance of structural interference through clever geometric design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances cleaning efficiency and reduces overall cleaning time by preventing structural interference, maintaining effective cleaning power across the substrate, particularly at the edge portions.
Implementation Method 1
The physical phenomenon generated by ultrasonic waves means that it is accomplished by a cavitation phenomenon of the ultrasonic waves, and the cavitation phenomenon is a phenomenon in which microbubbles are generated and destroyed by the pressure of the ultrasonic waves when ultrasonic energy propagates into the liquid, and is accompanied by very high pressure (tens to hundreds of atmospheric pressure) and high temperature (several hundred to thousands of degrees).
Implementation Method 2
ultrasonic cleaning is a process of removing contaminants attached to an object to be cleaned using a physical (ultrasonic waves) or chemical means (cleaning liquid, cleaning solution)
Implementation Method 3
a cleaning head formed to protrude downward from the bottom of the driving unit to be acoustically coupled to the vibrator to transfer high-frequency acoustic energy to the cleaning liquid on a substrate
Implementation Method 4
The ultrasonic waves apply vibration energy to the particles on the object to be cleaned so that the particles and other contaminants may be effectively removed from the object to be cleaned
Data Source
AI summary
The present invention relates to an ultrasonic cleaning unit with improved cleaning performance, which can improve overall substrate cleaning performance through improvement in the structure of a cleaning head of the ultrasonic cleaning unit, and the ultrasonic cleaning unit includes: a driving unit for receiving external power and vibrating an internal vibrator; and a cleaning head formed to protrude downward from a bottom of the driving unit to be acoustically coupled to the vibrator to transfer high-frequency acoustic energy to a cleaning liquid on a substrate, and an arc section formed to have a curvature corresponding to an outer circle of the substrate is included in an edge of a bottom surface of the cleaning head.