Ultrasonic Pixel Receiver Layout for Parasitic Capacitance Cancellation

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Solution Overview

Problem

Ultrasonic imaging apparatuses using thin-film transistor (TFT) technology suffer from low voltage conversion efficiency and high noise, which are not adequately addressed by existing technologies.

Innovation Solution

A pixel receiver with a first metallization layer above a substrate and a second metallization layer between the first layer and the substrate, where a second voltage is applied to reduce parasitic capacitance, enhancing sensitivity and efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If thin-film transistor (TFT) technology is used for pixel receiver circuits, then the device can be manufactured with existing semiconductor processes, but voltage conversion efficiency is low and noise is high

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidvoltage conversion efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent changes the technological parameter from TFT to CMOS technology for the pixel receiver circuits. This parameter change resolves the contradiction by achieving both high voltage conversion efficiency and low noise (improved reliability) while maintaining compatibility with existing semiconductor manufacturing processes (ease of manufacture).

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If thin-film transistor (TFT) technology is used for pixel receiver circuits, then the device can be manufactured with existing semiconductor processes, but noise is high

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidnoise
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The patent changes the technological parameter from TFT to CMOS technology for the pixel receiver circuits. This parameter change resolves the contradiction by achieving low noise (reduced harmful factors) while maintaining compatibility with existing semiconductor manufacturing processes (ease of manufacture).

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If a large metallization layer is used above the substrate, then the sensitivity to ultrasonic waves is improved, but parasitic capacitance increases

Engineering Contradiction:
ImprovesensitivityVSAvoidparasitic capacitance
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces an intermediate metallization layer between the first metallization layer (for sensitivity) and the substrate. This intermediary layer, when biased with an appropriate voltage, reduces the parasitic capacitance between the first metallization layer and the substrate, thereby resolving the contradiction between sensitivity and parasitic capacitance.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Measurement precision

If a large metallization layer is used above the substrate, then the sensitivity to ultrasonic waves is improved, but voltage conversion efficiency decreases

Engineering Contradiction:
ImprovesensitivityVSAvoidvoltage conversion efficiency
Core Design Contradiction:
Measurement precisionVSLoss of energy

Solution Approach 1:

The patent introduces an intermediate metallization layer between the first metallization layer (for sensitivity) and the substrate. This intermediary layer, when biased with an appropriate voltage, reduces the parasitic capacitance between the first metallization layer and the substrate, thereby resolving the contradiction between sensitivity and voltage conversion efficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves the sensitivity and efficiency of ultrasonic imaging by effectively reducing parasitic capacitance, leading to better voltage conversion and noise reduction.

Implementation Method 1

The receiving piezoelectric layer converts the reflected wave into voltages at respective inputs of the pixel sensors of the pixel receiver

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a device configured to apply a second voltage to the second metallization layer to reduce a parasitic capacitance between the first metallization layer and the substrate

Methodology Applied
Scientific EffectParasitic capacitance: Parasitic Capacitance

Data Source

PatentEP3345014B1Pixel receiver with capacitance cancellation for ultrasonic imaging apparatus
Publication Date: 2019.09.18 QUALCOMM INC
  • EP3345014B1 patent drawingFigure 1~2
  • EP3345014B1 patent drawingFigure 3
  • EP3345014B1 patent drawingFigure 4A

AI summary

An apparatus, such as a pixel sensor for an ultrasonic imaging apparatus, is disclosed. The apparatus includes a first metallization layer coupled to a piezoelectric layer, wherein a first voltage is formed at the first metallization layer in response to an ultrasonic wave reflecting off an item-to-be-imaged (e.g., a user's fingerprint) and propagating through the piezoelectric layer, and wherein the first metallization layer is situated above a substrate; a second metallization layer situated between the first metallization layer and the substrate; and a device configured to apply a second voltage to the second metallization layer to reduce a parasitic capacitance between the first metallization layer and the substrate.