Ultrasound Probe Focus Adjustment for Multi-Junction Semiconductor Inspection

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Solution Overview

Problem

Current ultrasound imaging devices require multiple probes to inspect multiple junction surfaces of a multi-junction semiconductor, leading to increased costs and complexity, particularly in in-line semiconductor inspection systems.

Innovation Solution

An ultrasound imaging device with signal processing and height adjustment capabilities that allows simultaneous visualization of multiple junction surfaces by adjusting the probe's focus to maximize displacement of reflected waves and using gate processing to generate images from these waves.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple probes are used to inspect multiple junction surfaces, then the inspection coverage is improved, but the device cost and complexity increase

Engineering Contradiction:

Improveinspection coverageVSAvoiddevice complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent makes a single probe capable of inspecting multiple junction surfaces by adjusting its focus position. The probe can be moved to different heights to inspect different junction surfaces sequentially, making one probe perform the function of multiple probes. This resolves the contradiction by maintaining inspection coverage while reducing device complexity and cost.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent introduces dynamic adjustment of the probe's focus position to enable inspection of multiple junction surfaces. By making the probe height adjustable, the system can adapt to inspect different depths dynamically, replacing the need for multiple fixed probes with one dynamically configurable probe.

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If multiple probes are used to inspect multiple junction surfaces, then the inspection coverage is improved, but the cost increases

Engineering Contradiction:

Improveinspection coverageVSAvoidcost

Core Design Contradiction:

Adaptability or versatilityVSQuantity of substance

Solution Approach 1:

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Measurement precision

If the probe focus is adjusted to maximize displacement of reflected waves, then the image quality is improved, but the inspection time increases

Engineering Contradiction:

Improveimage qualityVSAvoidinspection time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary adjustment of the probe focus position to predetermined heights corresponding to different junction surfaces. By pre-positioning the probe at optimal focus points, the system can quickly switch between inspection depths without performing real-time optimization, thus maintaining image quality while reducing inspection time.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the simultaneous visualization of multiple junction surfaces with reduced probe requirements, improving efficiency and cost-effectiveness in semiconductor inspection.

Implementation Method 1

The multi-junction semiconductor is irradiated with an ultrasound wave, and the junction surface is inspected, based on a reflected wave therefrom

Methodology Applied

Scientific EffectUltrasound reflection: Reflection

Implementation Method 2

signal processing means for causing a probe to irradiate a multi-junction semiconductor with an ultrasound wave having a predetermined frequency

Methodology Applied

Scientific EffectUltrasound: Ultrasound

Data Source

PatentUS10663433B2Ultrasound imaging device and method of generating image for ultrasound imaging device

Publication Date: 2020.05.26 HIATACHI POWER SOLUTIONS CO LTD

AI summary

An object is to simultaneously visualize a plurality of junction surfaces of a workpiece. An ultrasound imaging device serving as solution means includes a signal processing unit that causes a probe to irradiate a workpiece with an ultrasound wave having a predetermined frequency, and that performs gate processing on a reflected wave of the ultrasound wave detected by the probe so as to output a displacement of the reflected wave on two junction surfaces of the workpiece, an image generation unit that generates respective images of the two junction surfaces, based on the displacement of the respective reflected waves on the two junction surfaces, and a height adjustment unit that adjusts a height of a focus of the probe. The height adjustment unit adjusts the height of the probe so as to set the focus of the probe between the two junction surfaces.